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Year of Publication 26.09.2001
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Year of Publication 22.12.1999
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Year of Publication 25.08.1999
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Positive photoresists containing crosslinked polymers
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Year of Publication 31.01.2002
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POSITIVE PHOTORESIST COMPOSITION
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Year of Publication 23.01.2002
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Year of Publication 23.01.2002
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Positive photoresists containing crosslinked polymers
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Year of Publication 22.08.2001
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