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Year of Publication 30.05.2023
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에어 갭 (AIR-GAPPED) 플레넘들 및 오버헤드 격리 가스 분배기를 갖는 샤워헤드
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Year of Publication 30.12.2020
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DEPOSITION OF ALUMINUM OXIDE ETCH STOP LAYERS
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Year of Publication 24.05.2018
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Year of Publication 24.05.2018
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Oxidizing treatment of aluminum nitride films in semiconductor device manufacturing
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Year of Publication 12.05.2020
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Year of Publication 12.05.2020
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Deposition of aluminum oxide etch stop layers
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Year of Publication 13.10.2020
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Year of Publication 13.10.2020
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DEPOSITION OF ALUMINUM OXIDE ETCH STOP LAYERS
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Year of Publication 06.08.2020
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Year of Publication 06.08.2020
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Selective deposition with atomic layer etch reset
Sivaramakrishnan, Karthik, Hausmann, Dennis M, Smith, David Charles, Reddy, Kapu Sirish, Rainville, Meliha Gozde, Shankar, Nagraj, Porter, David W
Year of Publication 04.05.2021
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Year of Publication 04.05.2021
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Deposition of Aluminum oxide etch stop layers
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Year of Publication 26.05.2020
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Year of Publication 26.05.2020
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Composite dielectric interface layers for interconnect structures
Pasquale, Frank L, Reddy, Kapu Sirish, Swaminathan, Shankar, Rainville, Meliha Gozde, Shankar, Nagraj
Year of Publication 17.09.2019
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Year of Publication 17.09.2019
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OXIDIZING TREATMENT OF ALUMINUM NITRIDE FILMS IN SEMICONDUCTOR DEVICE MANUFACTURING
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Year of Publication 26.10.2017
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Year of Publication 26.10.2017
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SELECTIVE DEPOSITION WITH ATOMIC LAYER ETCH RESET
Sivaramakrishnan, Karthik, Hausmann, Dennis M, Smith, David Charles, Reddy, Kapu Sirish, Rainville, Meliha Gozde, Shankar, Nagraj, Porter, David W
Year of Publication 16.04.2020
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Year of Publication 16.04.2020
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Selective deposition with atomic layer etch reset
Sivaramakrishnan, Karthik, Hausmann, Dennis M, Smith, David Charles, Reddy, Kapu Sirish, Rainville, Meliha Gozde, Shankar, Nagraj, Porter, David W
Year of Publication 11.02.2020
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Year of Publication 11.02.2020
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COMPOSITE DIELECTRIC INTERFACE LAYERS FOR INTERCONNECT STRUCTURES
Pasquale, Frank L, Reddy, Kapu Sirish, Swaminathan, Shankar, Rainville, Meliha Gozde, Shankar, Nagraj
Year of Publication 29.11.2018
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Year of Publication 29.11.2018
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