Fourier spectrum method to determine dose-to-clear in a photoresist
Sun, Lei, Wood, Obert, Clifford, Chris, Raghunathan, Sudhar, Kritsun, Oleg, Lee, Myungjun, Kim, Ryoung-Han, Mangat, Pawitter, Koh, Hui Peng, Levinson, Harry
Published in Optics letters (15.01.2014)
Published in Optics letters (15.01.2014)
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