Normal vector method for convergence improvement using the RCWA for crossed gratings
Schuster, Thomas, Ruoff, Johannes, Kerwien, Norbert, Rafler, Stephan, Osten, Wolfgang
Published in Journal of the Optical Society of America. A, Optics, image science, and vision (01.09.2007)
Published in Journal of the Optical Society of America. A, Optics, image science, and vision (01.09.2007)
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Journal Article
Normal vector method for the RCWA with automated vector field generation
Götz, Peter, Schuster, Thomas, Frenner, Karsten, Rafler, Stephan, Osten, Wolfgang
Published in Optics express (27.10.2008)
Published in Optics express (27.10.2008)
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Journal Article
Fieldstitching with Kirchhoff-boundaries as a model based description for line edge roughness (LER) in scatterometry
Schuster, Thomas, Rafler, Stephan, Paz, Valeriano Ferreras, Frenner, Karsten, Osten, Wolfgang
Published in Microelectronic engineering (01.04.2009)
Published in Microelectronic engineering (01.04.2009)
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Journal Article
Conference Proceeding
Vectorial thin-element approximation: a semirigorous determination of Kirchhoff's boundary conditions
Kerwien, Norbert, Schuster, Thomas, Rafler, Stephan, Osten, Wolfgang, Totzeck, Michael
Published in Journal of the Optical Society of America. A, Optics, image science, and vision (01.04.2007)
Published in Journal of the Optical Society of America. A, Optics, image science, and vision (01.04.2007)
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Journal Article