Plasma properties in a large-volume, cylindrical and asymmetric radio-frequency capacitively coupled industrial-prototype reactor
Lazovi, Saša, Pua, Nevena, Spasi, Kosta, Malovi, Gordana, Cvelbar, Uroš, Mozeti, Miran, Radeti, Maja, Petrovi, Zoran Lj
Published in Journal of physics. D, Applied physics (20.02.2013)
Published in Journal of physics. D, Applied physics (20.02.2013)
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