Thin film deposition by means of atmospheric pressure microplasma jet
Benedikt, J, Raballand, V, Yanguas-Gil, A, Focke, K, von Keudell, A
Published in Plasma physics and controlled fusion (01.12.2007)
Published in Plasma physics and controlled fusion (01.12.2007)
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Journal Article
Deposition of silicon dioxide films using an atmospheric pressure microplasma jet
Raballand, V., Benedikt, J., Hoffmann, S., Zimmermann, M., von Keudell, A.
Published in Journal of applied physics (15.04.2009)
Published in Journal of applied physics (15.04.2009)
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Journal Article
Inactivation of Bacteria and Biomolecules by Low-Pressure Plasma Discharges
von Keudell, A., Awakowicz, P., Benedikt, J., Raballand, V., Yanguas-Gil, A., Opretzka, J., Flötgen, C., Reuter, R., Byelykh, L., Halfmann, H., Stapelmann, K., Denis, B., Wunderlich, J., Muranyi, P., Rossi, F., Kylián, O., Hasiwa, N., Ruiz, A., Rauscher, H., Sirghi, L., Comoy, E., Dehen, C., Challier, L., Deslys, J. P.
Published in Plasma processes and polymers (22.03.2010)
Published in Plasma processes and polymers (22.03.2010)
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Journal Article
High density fluorocarbon plasma etching of methylsilsesquioxane SiOC(H) low-k material and SiC(H) etch stop layer: surface analyses and investigation of etch mechanisms
Eon, D, Raballand, V, Cartry, G, Cardinaud, C
Published in Journal of physics. D, Applied physics (07.07.2007)
Published in Journal of physics. D, Applied physics (07.07.2007)
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Journal Article
Porous SiOCH, SiCH and SiO2 Etching in High Density Fluorocarbon Plasma with a Pulsed Bias
Raballand, Vanessa, Cartry, Gilles, Cardinaud, Christophe
Published in Plasma processes and polymers (25.07.2007)
Published in Plasma processes and polymers (25.07.2007)
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Journal Article
Etching of Bacillus atrophaeus by oxygen atoms, molecules and argon ions
Benedikt, J, Flötgen, C, Kussel, G, Raball, V, Keudell, A von
Published in Journal of physics. Conference series (01.10.2008)
Published in Journal of physics. Conference series (01.10.2008)
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Journal Article
Photonics integrated circuits on plasma-polymer-HMDSO: Single-mode TE00-TM00 straight waveguides, S-Bends, Y-Junctions and Mach-Zehnder Interferometers
Begou, T., Bechem B, Goullet, A., Granier, A., Cardinaud, C., Gaviot, E., Raballand, V., Landesman, J.P., Zyss, J.
Published in IECON 2006 - 32nd Annual Conference on IEEE Industrial Electronics (01.11.2006)
Published in IECON 2006 - 32nd Annual Conference on IEEE Industrial Electronics (01.11.2006)
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Conference Proceeding
AlGaN/GaN HEMTs on epitaxies grown on composite substrate
Hoel, V., Boulay, S., Gerard, H., Rabaland, V., Delos, E., De Jaeger, J.C., Di-Forte-Poisson, M.A., Brylinski, C., Lahreche, H., Langer, R., Bove, P.
Published in 2007 European Microwave Integrated Circuit Conference (01.10.2007)
Published in 2007 European Microwave Integrated Circuit Conference (01.10.2007)
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Conference Proceeding
Time resolved Langmuir probe measurements in inductively coupled plasmas
Cartry, G., Eon, D., Raballand, V., Gaboriau, F., Peignon, M.C., Cardinaud, Ch
Published in IEEE Conference Record - Abstracts. 2002 IEEE International Conference on Plasma Science (Cat. No.02CH37340) (2002)
Published in IEEE Conference Record - Abstracts. 2002 IEEE International Conference on Plasma Science (Cat. No.02CH37340) (2002)
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Conference Proceeding