Glass micromachining with sputtered silicon as a masking layer
Lazio, Z., Smiljanic, M. M., Rasljic, M.
Published in 2014 29th International Conference on Microelectronics Proceedings - MIEL 2014 (01.05.2014)
Published in 2014 29th International Conference on Microelectronics Proceedings - MIEL 2014 (01.05.2014)
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