Investigation of wafer temperature effect during implant for PMOS transistor fabrication
Tae-Hoon Huh, Byung-Jae Kang, Geum-Joo Ra, Shin-Woo Kang, Kim, S., Reece, R., Rubin, L.M., Min-Sung Lee, Jong-Oh Lee, Dong-Chul Park
Published in Extended Abstracts - 2008 8th International Workshop on Junction Technology (IWJT '08) (01.05.2008)
Published in Extended Abstracts - 2008 8th International Workshop on Junction Technology (IWJT '08) (01.05.2008)
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Conference Proceeding
A study of self-activation and low temperature furnace annealing for source/drain formation in AMLCD
Geum-Joo Ra, Yan Shao, Ke Chen, Urbahn, J., Blake, J.
Published in 1998 International Conference on Ion Implantation Technology. Proceedings (Cat. No.98EX144) (1999)
Published in 1998 International Conference on Ion Implantation Technology. Proceedings (Cat. No.98EX144) (1999)
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Conference Proceeding