ELECTROSTATIC CHUCK UNIT AND DEPOSITING APPARATUS INCLUDING THE SAME
KANG MIN GOO, RYU SUK HA, KO JUN HYEUK, KIM EUI GYU, SONG MIN CHUL, CHO YOUNG SUN
Year of Publication 14.05.2024
Get full text
Year of Publication 14.05.2024
Patent
SUBSTRATE MANUFACTURING APPARATUS
KANG MIN GOO, RYU SUK HA, KO JUN HYEUK, KIM EUI GYU, SONG MIN CHUL, KIM MIN SEOK
Year of Publication 28.03.2024
Get full text
Year of Publication 28.03.2024
Patent
DEPOSITION APPARATUS
MOON JAE SUK, KANG MIN GOO, RYU SUK HA, KO JUN HYEUK, KIM EUI GYU, SONG MIN CHUL, CHO YOUNG SUN
Year of Publication 28.02.2024
Get full text
Year of Publication 28.02.2024
Patent
DEPOSITION APPARATUS AND METHOD OF OPERATING THE SAME
KANG MIN GOO, RYU SUK HA, KO JUN HYEUK, KIM EUI GYU, SONG MIN CHUL, KIM MIN SEOK, CHO YOUNG SUN
Year of Publication 06.02.2024
Get full text
Year of Publication 06.02.2024
Patent
DEPOSITION APPARATUS
KANG, Min Goo, RYU, Suk Ha, SONG, Min Chul, CHO, Young Sun, KO, Jun Hyeuk, MOON, Jae Suk, KIM, Eui Gyu
Year of Publication 22.02.2024
Get full text
Year of Publication 22.02.2024
Patent
DEPOSITION APPARATUS AND DRIVING METHOD THEREOF
KANG, Min Goo, RYU, Suk Ha, SONG, Min Chul, CHO, Young Sun, KIM, Min Seok, KO, Jun Hyeuk, KIM, Eui Gyu
Year of Publication 01.02.2024
Get full text
Year of Publication 01.02.2024
Patent