A Study on High Frequency-Plasma Enhanced Chemical Vapor Deposition Silicon Nitride Films for Crystalline Silicon Solar Cells
Li, Zhen-Hua, Roh, Si-Cheol, Ryu, Dong-Yeol, Choi, Jeong-Ho, Seo, Hwa-Il, Kim, Yeong-Cheol
Published in Transactions on electrical and electronic materials (25.08.2011)
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Published in Transactions on electrical and electronic materials (25.08.2011)
Journal Article