Electrical Properties and Thermodynamic Stability of Sr(Ti 1-x ,Ru x )O 3 Thin Films Deposited by Inductive-Coupling-Plasma-Induced RF Magnetron Sputtering
Ryoichi Ohara, Ryoichi Ohara, Tatsuo Schimizu, Tatsuo Schimizu, Kenya Sano, Kenya Sano, Masahiko Yoshiki, Masahiko Yoshiki, Takashi Kawakubo, Takashi Kawakubo
Published in Japanese Journal of Applied Physics (01.03.2001)
Published in Japanese Journal of Applied Physics (01.03.2001)
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Journal Article
ELECTRICAL PROPERTIES AND THERMODYNAMIC STABILITY OF Sr(Ti1-x,Rux)O3 THIN FILMS DEPOSITED BY INDUCTIVE-COUPLING-PLASMA-INDUCED RF MAGNETRON SPUTTERING
Ohara, R, Schimizu, T, Sano, K, Yoshiki, M, Kawakubo, T
Published in Jpn.J.Appl.Phys ,Part 1. Vol. 40, no. 3A, pp. 1384-1387. 2001 (2001)
Published in Jpn.J.Appl.Phys ,Part 1. Vol. 40, no. 3A, pp. 1384-1387. 2001 (2001)
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Journal Article
THIN FILM PIEZOELECTRIC RESONATOR AND METHOD OF MANUFACTURING THE SAME
ITAYA, KAZUHIKO, YASUMOTO, TAKAAKI, SANO, KENYA, YANASE, NAOKO, OHARA, RYOICHI
Year of Publication 29.07.2015
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Year of Publication 29.07.2015
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