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"RUSSELL, DERREK, ANDREW"
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Method, apparatus and magnet assembly for enhancing and localizing a capacitively coupled plasma
by
Russell
,
Derrek Andrew
Year of Publication
20.07.2010
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Method, apparatus and magnet assembly for enhancing and localizing a capacitively coupled plasma
by
RUSSELL DERREK ANDREW
Year of Publication
20.07.2010
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Method, apparatus and magnet assembly for enhancing and localizing a capacitively coupled plasma
by
RUSSELL DERREK ANDREW
Year of Publication
13.06.2006
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Method, apparatus and magnet assembly for enhancing and localizing a capacitively coupled plasma
by
Russell
,
Derrek Andrew
Year of Publication
13.06.2006
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Magnetically enhanced capacitive plasma source for ionized physical vapor deposition
by
Vukovic, Mirko
,
Russell
,
Derrek Andrew
Year of Publication
01.01.2008
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Magnetically enhanced capacitive plasma source for ionized physical vapor deposition
by
VUKOVIC MIRKO
,
RUSSELL DERREK ANDREW
Year of Publication
01.01.2008
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Magnet device with high target utilization ratio used for sputtering target with conical butt
by
DERREK ANDREW RUSSELL
Year of Publication
06.10.2004
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Method, apparatus and magnet assembly for enhancing and localizing a capacitively coupled plasma
by
RUSSELL DERREK ANDREW
Year of Publication
24.06.2004
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MAGNETICALLY ENHANCED CAPACITIVE PLASMA SOURCE FOR IONIZED PHYSICAL VAPOR DEPOSITION
by
VUKOVIC MIRO
,
RUSSELL DERREK ANDREW
Year of Publication
23.05.2007
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MAGNETICALLY ENHANCED CAPACITIVE PLASMA SOURCE FOR IONIZED PHYSICAL VAPOUR DEPOSITION-IPVD
by
RUSSELL
,
DERREK
,
ANDREW
,
VUKOVIC, MIRKO
Year of Publication
18.05.2007
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HIGH TARGET UTILIZATION MAGNETIC ARRANGEMENT FOR A TRUNCATED CONICAL SPUTTERING TARGET
by
RUSSELL
,
DERREK
,
ANDREW
Year of Publication
10.09.2003
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High target utilization magnetic arrangement for a truncated conical sputtering target
by
RUSSELL
,
DERREK ANDREW
Year of Publication
01.07.2003
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Magnetically enhanced capacitive plasma source for ionized physical vapor deposition
by
VUKOVIC MIRKO
,
RUSSELL DERREK ANDREW
Year of Publication
01.08.2006
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Magnetically enhanced capacitive plasma source for ionized physical vapor deposition
by
Vukovic, Mirko
,
Russell
,
Derrek Andrew
Year of Publication
01.08.2006
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High target utilization magnetic arrangement for a truncated conical sputtering target
by
RUSSELL DERREK ANDREW
Year of Publication
01.10.2002
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High target utilization magnetic arrangement for a truncated conical sputtering target
by
Russell
,
Derrek Andrew
Year of Publication
01.10.2002
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Magnet device with high target utilization ratio used for sputtering target with conical butt
by
DERREK ANDREW RUSSELL
Year of Publication
20.02.2002
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HIGH TARGET UTILIZATION MAGNETIC ARRANGEMENT FOR A TRUNCATED CONICAL SPUTTERING TARGET
by
RUSSELL
,
DERREK
,
ANDREW
Year of Publication
17.10.2001
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HIGH TARGET UTILIZATION MAGNETIC ARRANGEMENT FOR A TRUNCATED CONICAL SPUTTERING TARGET
by
RUSSELL
,
DERREK
,
ANDREW
Year of Publication
25.05.2001
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METHOD AND APPARATUS FOR IONIZED PHYSICAL VAPOR DEPOSITION
by
CERIO, FRANK, MICHAEL, JR
,
GITTELMAN, BRUCE, DAVID
,
REYNOLDS, GLYN
,
VUKOVIC, MIRKO
,
DREWERY, JOHN, STEPHEN
,
BRCKA, JOZEF
,
RUSSELL
,
DERREK ANDREW
,
GRAPPERHAUS, MICHAEL, JAMES
Year of Publication
17.08.2011
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