MAGNETSYSTEM FÜR EINE ZERSTÄUBUNGSKATHODE
PACEARESCU, LARISA, RUDAKOWSKI, SIEGMAR, LUKHAUB, WALDEMAR, WEINDEL, CHRISTIAN
Year of Publication 15.06.2011
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Year of Publication 15.06.2011
Patent
MAGNET SYSTEM FOR A SPUTTERING CATHODE
PACEARESCU, LARISA, RUDAKOWSKI, SIEGMAR, LUKHAUB, WALDEMAR, WEINDEL, CHRISTIAN
Year of Publication 25.05.2011
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Year of Publication 25.05.2011
Patent