EUV and e-beam manufacturability: Challenges and solutions
Yao-Wen Chang, Ru-Gun Liu, Shao-Yun Fang
Published in 2015 52nd ACM/EDAC/IEEE Design Automation Conference (DAC) (01.06.2015)
Published in 2015 52nd ACM/EDAC/IEEE Design Automation Conference (DAC) (01.06.2015)
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Conference Proceeding
Preparation and Electronic Properties of YBa 2 Cu 3 O x Films with Controlled Oxygen Stoichiometries
Kaung-Hsiung Wu, Kaung-Hsiung Wu, Ming-Chih Hsieh, Ming-Chih Hsieh, Shih-Pu Chen, Shih-Pu Chen, Shyh-Chin Chao, Shyh-Chin Chao, Jenh-Yih Juang, Jenh-Yih Juang, Tseng-Ming Uen, Tseng-Ming Uen, Yih-Shung Gou, Yih-Shung Gou, Tseung-Yuen Tseng, Tseung-Yuen Tseng, Chao-Ming Fu, Chao-Ming Fu, Jin-Ming Chen, Jin-Ming Chen, Ru-Gun Liu, Ru-Gun Liu
Published in Japanese Journal of Applied Physics (01.08.1998)
Published in Japanese Journal of Applied Physics (01.08.1998)
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Journal Article
Method for forming semiconductor device structure
Chang, Shih-Ming, Lin, Wei-Liang, Lai, Chih-Ming, Tseng, Chin-Yuan, Liu, Ru-Gun
Year of Publication 19.12.2023
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Year of Publication 19.12.2023
Patent