Advanced Cryogenic Aerosol Cleaning: Small Particle Removal and Damage-Free Performance
Printz, Wallace P., Rotondaro, Antonio L.P., Butterbaugh, Jeffery W., Rathman, Christina Ann, Thomes, Gregory P., Schwab, Brent D., Lauerhaas, Jeffrey M., Becker, David Scott, Mbanaso, Chimaobi, Bassett, Derek W.
Published in Solid state phenomena (01.01.2016)
Published in Solid state phenomena (01.01.2016)
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Journal Article
Development of MCM-D technology with photosensitive benzocyclobutene
Adamo, Cristina B., Flacker, Alexander, Cavalcanti, Hercilio M., Teixeira, Ricardo C., Rotondaro, Antonio L. P., Manera, Leandro T.
Published in 2015 30th Symposium on Microelectronics Technology and Devices (SBMicro) (01.08.2015)
Published in 2015 30th Symposium on Microelectronics Technology and Devices (SBMicro) (01.08.2015)
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Conference Proceeding
Cryogenic Nano-Aerosol: Particle Removal and Damage-Free Cleaning for IC Manufacturing
Lauerhaas, Jeffrey M., Thomes, Gregory P., Schwab, Brent D., Rathman, Christina Ann, Rotondaro, Antonio L. P., Bassett, Derek W., Butterbaugh, Jeffery W., Mbanaso, Chimaobi
Published in 2019 China Semiconductor Technology International Conference (CSTIC) (01.03.2019)
Published in 2019 China Semiconductor Technology International Conference (CSTIC) (01.03.2019)
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Conference Proceeding
Process and apparatus for processing a nitride structure without silica deposition
Furukawa, Takahiro, Bassett, Derek, Minami, Teruomi, Rotondaro, Antonio L. P, Printz, Wallace P
Year of Publication 09.02.2021
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Year of Publication 09.02.2021
Patent
Process and apparatus for processing a nitride structure without silica deposition
Furukawa, Takahiro, Bassett, Derek, Minami, Teruomi, Rotondaro, Antonio L. P, Printz, Wallace P
Year of Publication 24.12.2019
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Year of Publication 24.12.2019
Patent
PROCESS AND APPARATUS FOR PROCESSING A NITRIDE STRUCTURE WITHOUT SILICA DEPOSITION
Furukawa, Takahiro, Bassett, Derek, Minami, Teruomi, Rotondaro, Antonio L. P, Printz, Wallace P
Year of Publication 01.08.2019
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Year of Publication 01.08.2019
Patent
Development of Multi-Chip Module-D technology-testchip
Freitas, Wilson, Flacker, Alexander, Adamo, Cristina B., Rotondaro, Antonio L. P.
Published in 28th Symposium on Microelectronics Technology and Devices (SBMicro 2013) (01.09.2013)
Published in 28th Symposium on Microelectronics Technology and Devices (SBMicro 2013) (01.09.2013)
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Conference Proceeding
Multi-Chip Module (MCM-D) using thin film technology
Adamo, Cristina B., Flacker, Alexander, Freitas, Wilson, Teixeira, Ricardo C., da Silva, Michele O., Rotondaro, Antonio L. P.
Published in 2014 29th Symposium on Microelectronics Technology and Devices (SBMicro) (01.09.2014)
Published in 2014 29th Symposium on Microelectronics Technology and Devices (SBMicro) (01.09.2014)
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Conference Proceeding