Search Results - "ROSTALSKI, HANS-JUERGEN" :: K.UTB vyhledávací portál

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대물 필드를 이미지 필드 내로 이미징하기 위한 이미징 광학 유닛, 및 이러한 이미징 광학 유닛을 포함하는 투영 노광 장치

by SCHWAB MARKUS, ROSTALSKI HANS JUERGEN
Year of Publication 09.02.2018

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Projection optical unit for microlithography and method for producing a structured component

by Rostalski, Hans-Juergen, Menke, Christoph, Muenz, Holger
Year of Publication 16.05.2023

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Imaging optical unit for imaging an object field into an image field, and projection exposure apparatus including such an imaging optical unit

by Rostalski, Hans-Juergen
Year of Publication 09.04.2019

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PROJECTION OPTICAL UNIT FOR MICROLITHOGRAPHY AND METHOD FOR PRODUCING A STRUCTURED COMPONENT

by Rostalski, Hans-Juergen, Menke, Christoph, Muenz, Holger
Year of Publication 07.04.2022

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IMAGING OPTICAL UNIT FOR IMAGING AN OBJECT FIELD INTO AN IMAGE FIELD, AND PROJECTION EXPOSURE APPARATUS INCLUDING SUCH AN IMAGING OPTICAL UNIT

by Rostalski, Hans-Juergen
Year of Publication 30.08.2018

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Imaging optical unit and projection exposure apparatus including same

by Schwab, Markus, Rostalski, Hans-Juergen
Year of Publication 07.01.2020

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Imaging optical unit for imaging an object field into an image field, and projection exposure apparatus including such an imaging optical unit

by Rostalski, Hans-Juergen, Wolf, Alexander
Year of Publication 25.06.2019

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IMAGING OPTICAL UNIT FOR IMAGING AN OBJECT FIELD INTO AN IMAGE FIELD, AND PROJECTION EXPOSURE APPARATUS INCLUDING SUCH AN IMAGING OPTICAL UNIT

by Rostalski, Hans-Juergen, Wolf, Alexander
Year of Publication 06.09.2018

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IMAGING OPTICAL UNIT AND PROJECTION EXPOSURE APPARATUS INCLUDING SAME

by Schwab Markus, Rostalski Hans-Juergen
Year of Publication 29.03.2018

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Imaging optical unit for imaging an object field into an image field

by Beder, Susanne, Rostalski, Hans-Juergen, Wolf, Alexander, Ruoff, Johannes
Year of Publication 14.09.2021

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Measuring arrangement for measuring optical properties of a reflective optical element, in particular for microlithography

by Bol Johannes, Rostalski Hans-Juergen
Year of Publication 18.07.2017

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Imaging optical unit and projection exposure apparatus for projection lithography, having such imaging optical unit

by Rostalski, Hans-Juergen, Epple, Alexander, Mueller, Ralf
Year of Publication 27.11.2018

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Chromatically corrected objective with specifically structured and arranged dioptric optical elements and projection exposure apparatus including the same

by Rostalski, Hans-Juergen, Feldmann, Heiko, Epple, Alexander
Year of Publication 16.10.2018

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IMAGING OPTICAL UNIT FOR IMAGING AN OBJECT FIELD INTO AN IMAGE FIELD

by Beder, Susanne, Rostalski, Hans-Juergen, Wolf, Alexander, Ruoff, Johannes
Year of Publication 09.07.2020

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MEASURING ARRANGEMENT FOR MEASURING OPTICAL PROPERTIES OF A REFLECTIVE OPTICAL ELEMENT, IN PARTICULAR FOR MICROLITHOGRAPHY

by BOL Johannes, ROSTALSKI Hans-Juergen
Year of Publication 22.09.2016

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Imaging optical unit

by MUENZ, HOLGER, ROSTALSKI, HANS-JUERGEN, MENKE, CHRISTOPH
Year of Publication 16.02.2023

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Imaging optical unit

by MUENZ, HOLGER, ROSTALSKI, HANS-JUERGEN, MENKE, CHRISTOPH
Year of Publication 01.02.2023

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Imaging optical unit for imaging an object field into an image field

by ROSTALSKI, HANS-JUERGEN, WOLF, ALEXANDER, RUOFF, JOHANNES, BEDER, SUSANNE
Year of Publication 21.06.2023

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Imaging optical unit and projection exposure apparatus for projection lithography comprising such an imaging optical unit

by SCHICKETANZ THOMAS, ROSTALSKI HANS-JUERGEN, MIGURA SASCHA
Year of Publication 22.03.2016

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Projection optical unit for microlithography and method for producing a structured component

by MUENZ, HOLGER, MENKE, CHRISTOPH, ROSTALSKI, HANS JUERGEN
Year of Publication 01.02.2021

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