Preparation of superhard amorphous carbon films with low internal stress
Weissmantel, Steffen, Reisse, Günter, Rost, Dirk
Published in Surface & coatings technology (01.11.2004)
Published in Surface & coatings technology (01.11.2004)
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Journal Article
Reduction of particulate density in BN films prepared by pulsed laser deposition
Reiße, Günter, Rost, Dirk, Weißmantel, Steffen
Published in Journal of physics. Conference series (01.04.2007)
Published in Journal of physics. Conference series (01.04.2007)
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Journal Article
Stresses in pulsed laser deposited cubic boron nitride films
Reisse, Guenter, Weissmantel, Steffen, Rost, Dirk
Published in Diamond and related materials (01.03.2002)
Published in Diamond and related materials (01.03.2002)
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Journal Article
Conference Proceeding
Preparation of superhard amorphous carbon films with low internal stress
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Conference Proceeding
Yield improvement by localized trimming in semiconductor and MEMS manufacturing
Nestler, M., Demmler, M., Dunger, T., Rost, D., Zeuner, M.
Published in 2011 Semiconductor Conference Dresden (01.09.2011)
Published in 2011 Semiconductor Conference Dresden (01.09.2011)
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Conference Proceeding
Method and device for structuring at least one region of a solid surface uses a nano- to femto-second pulsed laser to form a grid structure with a polarized beam and relative movement to the surface
WEISMANTEL, STEFFEN, LOESCHNER, UDO, ENGEL, ANDY, ROST, DIRK, REISE, GUENTER
Year of Publication 15.03.2007
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Year of Publication 15.03.2007
Patent
Method and device for structuring at least one region of a solid surface uses a nano- to femto-second pulsed laser to form a grid structure with a polarized beam and relative movement to the surface
WEISMANTEL, STEFFEN, LOESCHNER, UDO, ENGEL, ANDY, ROST, DIRK, REISE, GUENTER
Year of Publication 01.02.2007
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Year of Publication 01.02.2007
Patent