Methods and systems of transferring, docking and processing substrates
ROSE RONALD L, PARK KON, ZHU SIMON, SHIN GENE, WANG XIAOMING, LIU REX, PAK SAMUEL S, LEI LAWRENCE CHUNG-LAI, MAK ALFRED, WU TZYUNG TERRY
Year of Publication 05.02.2013
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Year of Publication 05.02.2013
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Methods and systems of transferring, docking and processing substrates
ROSE RONALD L, PARK KON, ZHU SIMON, SHIN GENE, WANG XIAOMING, LIU REX, PAK SAMUEL S, LEI LAWRENCE CHUNG-LAI, MAK ALFRED, WU TZYUNG TERRY
Year of Publication 18.09.2012
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Year of Publication 18.09.2012
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Methods and systems of transferring, docking and processing substrates
Lei, Lawrence Chung-Lai, Mak, Alfred, Liu, Rex, Park, Kon, Pak, Samuel S, Wu, Tzy-Chung Terry, Zhu, Simon, Rose, Ronald L, Shin, Gene, Wang, Xiaoming
Year of Publication 18.09.2012
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Year of Publication 18.09.2012
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Integrated facility and process chamber for substrate processing
ROSE RONALD L, PARK KON, LIU REX, LEI LAWRENCE CHUNG-LAI, MAK ALFRED, WU TZYUNG TERRY
Year of Publication 01.07.2010
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Year of Publication 01.07.2010
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Methods and Systems of Transferring, Docking and Processing Substrates
ROSE RONALD L, PARK KON, ZHU SIMON, SHIN GENE, WANG XIAOMING, LIU REX, PAK SAMUEL S, LEI LAWRENCE CHUNG-LAI, MAK ALFRED, WU TZYUNG TERRY
Year of Publication 08.09.2011
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Year of Publication 08.09.2011
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Methods and Systems of Transferring, Docking and Processing Substrates
ROSE RONALD L, PARK KON, ZHU SIMON, SHIN GENE, WANG XIAOMING, LIU REX, PAK SAMUEL S, LEI LAWRENCE CHUNG-LAI, MAK ALFRED, WU TZYUNG TERRY
Year of Publication 23.06.2011
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Year of Publication 23.06.2011
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Methods and systems of transferring, docking and processing substrates
ROSE RONALD L, PARK KON, ZHU SIMON, SHIN GENE, WANG XIAOMING, LIU REX, PAK SAMUEL S, LEI LAWRENCE CHUNG-LAI, MAK ALFRED, WU TZYUNG TERRY
Year of Publication 01.03.2011
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Year of Publication 01.03.2011
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Methods and systems of transferring, docking and processing substrates
Lei, Lawrence Chung-Lai, Mak, Alfred, Liu, Rex, Park, Kon, Pak, Samuel S, Wu, Tzy-Chung Terry, Zhu, Simon, Rose, Ronald L, Shin, Gene, Wang, Xiaoming
Year of Publication 01.03.2011
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Year of Publication 01.03.2011
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Methods and systems of transferring, docking and processing substrates
ROSE RONALD L, PARK KON, ZHU SIMON, SHIN GENE, WANG XIAOMING, LIU REX, PAK SAMUEL S, LEI LAWRENCE CHUNG-LAI, MAK ALFRED, WU TZYUNG TERRY
Year of Publication 01.07.2010
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Year of Publication 01.07.2010
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METHODS AND SYSTEMS OF TRANSFERRING, DOCKING AND PROCESSING SUBSTRATES
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Year of Publication 04.11.2010
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Year of Publication 04.11.2010
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METHODS AND SYSTEMS OF TRANSFERRING, DOCKING AND PROCESSING SUBSTRATES
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Year of Publication 08.07.2010
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Year of Publication 08.07.2010
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Process module facility
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Year of Publication 18.07.2012
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Year of Publication 18.07.2012
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Apparatus for improved remote microwave plasma source for use with substrate processing systems
ROSE RONALD L, KAO CHIEN-TEH, TSAI KENNETH, YUDOVSKY JOSEPH, PHAM QUYEN, AUGASON CALVIN R
Year of Publication 22.11.2001
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Year of Publication 22.11.2001
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Integrated temperature controlled exhaust and cold trap assembly
UMOTOY, SALVADOR P, ROSE, RONALD L, HUSTON, JOEL, ELLWANGER, RUSSELL C, LEI, LAWRENCE CHUNG-LAI
Year of Publication 01.09.2001
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Year of Publication 01.09.2001
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Method for improved remote microwave plasma source for use with substrate processing system
ROSE RONALD L, KAO CHIEN-TEH, TSAI KENNETH, YUDOVSKY JOSEPH, PHAM QUYEN, AUGASON CALVIN R
Year of Publication 07.08.2001
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Year of Publication 07.08.2001
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Method for transferring a substrate to two or more process modules
ROSE RONALD L, PARK KON, ZHU SIMON, SHIN GENE, WANG XIAOMING, LIU REX, PAK SAMUEL S, LEI LAWRENCE CHUNG-LAI, MAK ALFRED, WU TZYUNG TERRY
Year of Publication 27.02.2013
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Year of Publication 27.02.2013
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Cold trap assembly
Umotoy, Salvador P, Lei, Lawrence Chung-Lai, Ellwanger, Russell C, Rose, Ronald L, Huston, Joel, Chen, James Jin-Long
Year of Publication 11.02.2003
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Year of Publication 11.02.2003
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Cold trap assembly
ROSE RONALD L, HUSTON JOEL, ELLWANGER RUSSELL C, UMOTOY SALVADOR P, LEI LAWRENCE CHUNG-LAI, CHEN JAMES JIN-LONG
Year of Publication 11.02.2003
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Year of Publication 11.02.2003
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Apparatus for improved remote microwave plasma source for use with substrate processing systems
ROSE, RONALD L, TSAI, KENNETH, AUGASON, CALVIN R., GUO, JI-TAI, PHAM, QUYEN
Year of Publication 21.04.2000
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Year of Publication 21.04.2000
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Apparatus for improved remote microwave plasma source for use with substrate processing systems
KAO; CHIEN-TEH, YUDOVSKY; JOSEPH, TSAI; KENNETH, AUGASON; CALVIN R, PHAM; QUYEN, ROSE; RONALD L
Year of Publication 22.02.2000
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Year of Publication 22.02.2000
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