High-Speed Spatial Atomic-Layer Deposition of Aluminum Oxide Layers for Solar Cell Passivation
Poodt, Paul, Lankhorst, Adriaan, Roozeboom, Fred, Spee, Karel, Maas, Diederik, Vermeer, Ad
Published in Advanced materials (Weinheim) (24.08.2010)
Published in Advanced materials (Weinheim) (24.08.2010)
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Journal Article
Precision in harsh environments
French, Paddy, Krijnen, Gijs, Roozeboom, Fred
Published in Microsystems & nanoengineering (10.10.2016)
Published in Microsystems & nanoengineering (10.10.2016)
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Journal Article
Dopant Distribution in Atomic Layer Deposited ZnO:Al Films Visualized by Transmission Electron Microscopy and Atom Probe Tomography
Wu, Yizhi, Giddings, A. Devin, Verheijen, Marcel A, Macco, Bart, Prosa, Ty J, Larson, David J, Roozeboom, Fred, Kessels, Wilhelmus M. M
Published in Chemistry of materials (27.02.2018)
Published in Chemistry of materials (27.02.2018)
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Journal Article
Atomic Layer Deposition of In2O3:H from InCp and H2O/O2: Microstructure and Isotope Labeling Studies
Wu, Yizhi, Macco, Bart, Vanhemel, Dries, Kölling, Sebastian, Verheijen, Marcel A, Koenraad, Paul M, Kessels, Wilhelmus M. M, Roozeboom, Fred
Published in ACS applied materials & interfaces (11.01.2017)
Published in ACS applied materials & interfaces (11.01.2017)
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Journal Article
Recent Advances in Atmospheric Vapor-Phase Deposition of Transparent and Conductive Zinc Oxide
Illiberi, Andrea, Poodt, Paul, Bolt, Pieter-Jan, Roozeboom, Fred
Published in Chemical vapor deposition (01.09.2014)
Published in Chemical vapor deposition (01.09.2014)
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Journal Article
Research Update: Atmospheric pressure spatial atomic layer deposition of ZnO thin films: Reactors, doping, and devices
Hoye, Robert L. Z., Muñoz-Rojas, David, Nelson, Shelby F., Illiberi, Andrea, Poodt, Paul, Roozeboom, Fred, MacManus-Driscoll, Judith L.
Published in APL materials (01.04.2015)
Published in APL materials (01.04.2015)
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Journal Article
Tuning Nanopores in Tubular Ceramic Nanofiltration Membranes with Atmospheric-Pressure Atomic Layer Deposition: Prospects for Pressure-Based In-Line Monitoring of Pore Narrowing
Nijboer, Michiel, Jan, Asif, Chen, Mingliang, Batenburg, Kevin, Peper, Julia, Aarnink, Tom, Roozeboom, Fred, Kovalgin, Alexey, Nijmeijer, Arian, Luiten-Olieman, Mieke
Published in Separations (01.01.2024)
Published in Separations (01.01.2024)
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Journal Article
Tin Nitride Thin Films as Negative Electrode Material for Lithium-Ion Solid-State Batteries
Baggetto, Loïc, Verhaegh, Nynke A. M., Niessen, Rogier A. H., Roozeboom, Fred, Jumas, Jean-Claude, Notten, Peter H. L.
Published in Journal of the Electrochemical Society (2010)
Published in Journal of the Electrochemical Society (2010)
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Journal Article
High‐Throughput Area‐Selective Spatial Atomic Layer Deposition of SiO2 with Interleaved Small Molecule Inhibitors and Integrated Back‐Etch Correction for Low Defectivity
Karasulu, Bora, Roozeboom, Fred, Mameli, Alfredo
Published in Advanced materials (Weinheim) (01.06.2023)
Published in Advanced materials (Weinheim) (01.06.2023)
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Journal Article
High-Throughput Area-Selective Spatial Atomic Layer Deposition of SiO 2 with Interleaved Small Molecule Inhibitors and Integrated Back-Etch Correction for Low Defectivity
Karasulu, Bora, Roozeboom, Fred, Mameli, Alfredo
Published in Advanced materials (Weinheim) (01.06.2023)
Published in Advanced materials (Weinheim) (01.06.2023)
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Journal Article
Area-Selective Atomic Layer Deposition of SiO2 Using Acetylacetone as a Chemoselective Inhibitor in an ABC-Type Cycle
Mameli, Alfredo, Merkx, Marc J. M, Karasulu, Bora, Roozeboom, Fred, Kessels, Wilhelmus (Erwin) M. M, Mackus, Adriaan J. M
Published in ACS nano (26.09.2017)
Published in ACS nano (26.09.2017)
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Journal Article
Area-Selective Atomic Layer Deposition of ZnO by Area Activation Using Electron Beam-Induced Deposition
Mameli, Alfredo, Karasulu, Bora, Verheijen, Marcel A, Barcones, Beatriz, Macco, Bart, Mackus, Adriaan J. M, Kessels, Wilhelmus M. M. Erwin, Roozeboom, Fred
Published in Chemistry of materials (26.02.2019)
Published in Chemistry of materials (26.02.2019)
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Journal Article
Unfolding an Elusive Area-Selective Deposition Process: Atomic Layer Deposition of TiO2 and TiON on SiN vs SiO2
Mameli, Alfredo, Tapily, Kanda, Shen, Jie, Roozeboom, Fred, Lu, Mengcheng, O’Meara, David, Semproni, Scott P., Chen, Jiun-Ruey, Clark, Robert, Leusink, Gert, Clendenning, Scott
Published in ACS applied materials & interfaces (20.03.2024)
Published in ACS applied materials & interfaces (20.03.2024)
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Journal Article
Unfolding an Elusive Area-Selective Deposition Process: Atomic Layer Deposition of TiO 2 and TiON on SiN vs SiO 2
Mameli, Alfredo, Tapily, Kanda, Shen, Jie, Roozeboom, Fred, Lu, Mengcheng, O'Meara, David, Semproni, Scott P, Chen, Jiun-Ruey, Clark, Robert, Leusink, Gert, Clendenning, Scott
Published in ACS applied materials & interfaces (20.03.2024)
Published in ACS applied materials & interfaces (20.03.2024)
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Journal Article
Area-Selective Atomic Layer Deposition of In2O3:H Using a μ‑Plasma Printer for Local Area Activation
Mameli, Alfredo, Kuang, Yinghuan, Aghaee, Morteza, Ande, Chaitanya K, Karasulu, Bora, Creatore, Mariadriana, Mackus, Adriaan J. M, Kessels, Wilhelmus M. M, Roozeboom, Fred
Published in Chemistry of materials (14.02.2017)
Published in Chemistry of materials (14.02.2017)
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Journal Article
3-D Integrated All-Solid-State Rechargeable Batteries
Notten, P. H. L., Roozeboom, F., Niessen, R. A. H., Baggetto, L.
Published in Advanced materials (Weinheim) (17.12.2007)
Published in Advanced materials (Weinheim) (17.12.2007)
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Journal Article
Review Article: Recommended reading list of early publications on atomic layer deposition—Outcome of the “Virtual Project on the History of ALD”
Ahvenniemi, Esko, Akbashev, Andrew R., Ali, Saima, Bechelany, Mikhael, Berdova, Maria, Boyadjiev, Stefan, Cameron, David C., Chen, Rong, Chubarov, Mikhail, Cremers, Veronique, Devi, Anjana, Drozd, Viktor, Elnikova, Liliya, Gottardi, Gloria, Grigoras, Kestutis, Hausmann, Dennis M., Hwang, Cheol Seong, Jen, Shih-Hui, Kallio, Tanja, Kanervo, Jaana, Khmelnitskiy, Ivan, Kim, Do Han, Klibanov, Lev, Koshtyal, Yury, Krause, A. Outi I., Kuhs, Jakob, Kärkkänen, Irina, Kääriäinen, Marja-Leena, Kääriäinen, Tommi, Lamagna, Luca, Łapicki, Adam A., Leskelä, Markku, Lipsanen, Harri, Lyytinen, Jussi, Malkov, Anatoly, Malygin, Anatoly, Mennad, Abdelkader, Militzer, Christian, Molarius, Jyrki, Norek, Małgorzata, Özgit-Akgün, Çağla, Panov, Mikhail, Pedersen, Henrik, Piallat, Fabien, Popov, Georgi, Puurunen, Riikka L., Rampelberg, Geert, Ras, Robin H. A., Rauwel, Erwan, Roozeboom, Fred, Sajavaara, Timo, Salami, Hossein, Savin, Hele, Schneider, Nathanaelle, Seidel, Thomas E., Sundqvist, Jonas, Suyatin, Dmitry B., Törndahl, Tobias, van Ommen, J. Ruud, Wiemer, Claudia, Ylivaara, Oili M. E., Yurkevich, Oksana
Published in Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films (01.01.2017)
Published in Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films (01.01.2017)
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Book Review