Growth rate of a-Si:H film influenced by magnetic field gradient in MWECR CVD plasma system
Hu Yuehui, Chen Guanghua, Zhu Xiuhong, Rong Yandong, Gao Zhuo, Li Ying, Zhou Huaien
Published in IVESC 2004. The 5th International Vacuum Electron Sources Conference Proceedings (IEEE Cat. No.04EX839) (2004)
Published in IVESC 2004. The 5th International Vacuum Electron Sources Conference Proceedings (IEEE Cat. No.04EX839) (2004)
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