Reliability characterization of a soot particle sensor in terms of stress- and electromigration in thin-film platinum
Rusanov, Radoslav, Rank, Holger, Fuchs, Tino, Mueller-Fiedler, Roland, Kraft, Oliver
Published in Microsystem technologies : sensors, actuators, systems integration (01.03.2016)
Published in Microsystem technologies : sensors, actuators, systems integration (01.03.2016)
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Journal Article
Experimental Study of In-Plane and Out-of-Plane Adhesions in Microelectromechanical Systems
Friedrich, T., Raudzis, C., Muller-Fiedler, R.
Published in Journal of microelectromechanical systems (01.12.2009)
Published in Journal of microelectromechanical systems (01.12.2009)
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Journal Article
High-cycle fatigue and strengthening in polycrystalline silicon
Boroch, Robert E., Müller-Fiedler, Roland, Bagdahn, Joerg, Gumbsch, Peter
Published in Scripta materialia (01.11.2008)
Published in Scripta materialia (01.11.2008)
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Journal Article
Reliability Aspects of Microsystems for Automotive Applications
Müller-Fiedler, Roland, Nötzold, Kerstin, Schneider, Arnold, Rank, Holger, Graf, Jürgen
Published in Advanced engineering materials (01.04.2009)
Published in Advanced engineering materials (01.04.2009)
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Journal Article
Reliability characterization of a soot particle sensor: Analysis of stress- and electromigration in thin-film platinum
Rusanov, Radoslav, Graf, Juergen, Rank, Holger, Fuchs, Tino, Mueller-Fiedler, Roland, Kraft, Oliver
Published in 2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) (01.04.2014)
Published in 2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) (01.04.2014)
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Conference Proceeding