Investigation of amorphous hydrogenated carbon layers as sacrificial structures for MEMS applications
Roth, Andre, Kautzsch, Thoralf, Vogt, Mirko, Stegemann, Maik, Frohlich, Heiko, Breitkopf, Cornelia
Published in IEEE SENSORS 2014 Proceedings (01.11.2014)
Published in IEEE SENSORS 2014 Proceedings (01.11.2014)
Get full text
Conference Proceeding
Producing a buried cavity in a semiconductor substrate
Stegemann, Maik, Kautzsch, Thoralf, Rudolph, Uwe, Vogt, Mirko, Binder, Boris, Roeth, Andre
Year of Publication 19.07.2022
Get full text
Year of Publication 19.07.2022
Patent
Microelectromechanical device, method for manufacturing a microelectromechanical device, and method for manufacturing a system on chip using a CMOS process
Stegemann, Maik, Kautzsch, Thoralf, Froehlich, Heiko, Vogt, Mirko, Bieselt, Steffen, Roeth, Andre
Year of Publication 03.08.2021
Get full text
Year of Publication 03.08.2021
Patent
PRODUCING A BURIED CAVITY IN A SEMICONDUCTOR SUBSTRATE
ROETH, Andre, RUDOLPH, Uwe, BINDER, Boris, STEGEMANN, Maik, KAUTZSCH, Thoralf, VOGT, Mirko
Year of Publication 14.01.2021
Get full text
Year of Publication 14.01.2021
Patent
MICROELECTROMECHANICAL DEVICE, METHOD FOR MANUFACTURING A MICROELECTROMECHANICAL DEVICE, AND METHOD FOR MANUFACTURING A SYSTEM ON CHIP USING A CMOS PROCESS
BIESELT, Steffen, FROEHLICH, Heiko, ROETH, Andre, STEGEMANN, Maik, KAUTZSCH, Thoralf, VOGT, Mirko
Year of Publication 17.09.2020
Get full text
Year of Publication 17.09.2020
Patent
Microelectromechanical device, method for manufacturing a microelectromechanical device, and method for manufacturing a system on chip using a CMOS process
Stegemann, Maik, Kautzsch, Thoralf, Froehlich, Heiko, Vogt, Mirko, Bieselt, Steffen, Roeth, Andre
Year of Publication 16.06.2020
Get full text
Year of Publication 16.06.2020
Patent
Integrated semiconductor device and manufacturing method
Stegemann, Maik, Kautzsch, Thoralf, Winkler, Bernhard, Froehlich, Heiko, Scire, Alessia, Vogt, Mirko, Bieselt, Steffen, Roeth, Andre
Year of Publication 28.01.2020
Get full text
Year of Publication 28.01.2020
Patent
Stressed decoupled micro-electro-mechanical system sensor
Knott, Bernhard, Stegemann, Maik, Kautzsch, Thoralf, Theuss, Horst, Froehlich, Heiko, Langheinrich, Wolfram, Vogt, Mirko, Bieselt, Steffen, Haubold, Marco, Roeth, Andre
Year of Publication 22.12.2020
Get full text
Year of Publication 22.12.2020
Patent
Pressure sensor device and manufacturing method
Stegemann, Maik, Kautzsch, Thoralf, Froehlich, Heiko, Vogt, Mirko, Haubold, Marco, Roeth, Andre
Year of Publication 20.08.2019
Get full text
Year of Publication 20.08.2019
Patent
STRESSED DECOUPLED MICRO-ELECTRO-MECHANICAL SYSTEM SENSOR
Knott, Bernhard, Stegemann, Maik, THEUSS, Horst, Kautzsch, Thoralf, Froehlich, Heiko, Langheinrich, Wolfram, Vogt, Mirko, Bieselt, Steffen, Haubold, Marco, Roeth, Andre
Year of Publication 02.01.2020
Get full text
Year of Publication 02.01.2020
Patent
Erzeugen eines vergrabenen Hohlraums in einem Halbleitersubstrat
Stegemann, Maik, Kautzsch, Thoralf, Vogt, Mirko, Rudolph, Uwe, Binder, Boris, Roeth, Andre
Year of Publication 28.09.2023
Get full text
Year of Publication 28.09.2023
Patent