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Year of Publication 22.06.2023
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SUBSTRATE SUPPORT GAP PUMPING TO PREVENT GLOW DISCHARGE AND LIGHT-UP
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Year of Publication 22.06.2023
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Year of Publication 04.05.2023
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MODULAR MICROWAVE SOURCE WITH MULTIPLE METAL HOUSINGS
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Year of Publication 19.04.2023
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Monolithic modular microwave source with integrated temperature control
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Year of Publication 24.01.2023
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MONOLITHIC MODULAR MICROWAVE SOURCE WITH INTEGRATED TEMPERATURE CONTROL
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MODULAR MICROWAVE SOURCE WITH MULTIPLE METAL HOUSINGS
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Year of Publication 16.12.2021
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MODULAR MICROWAVE SOURCE WITH MULTIPLE METAL HOUSINGS
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Year of Publication 16.12.2021
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Year of Publication 16.12.2021
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