최소 RF 손실을 갖는 다중 존 히터
ROCHA ALVAREZ JUAN CARLOS, SRINIVASAMURTHY VIDYADHARAN, LI JIAN, HAMMOND EDWARD P
Year of Publication 07.03.2024
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Year of Publication 07.03.2024
Patent
도포 체적에서 최하부 퍼지 침입을 방지하고 히터 아래로 프로세스 가스 확산을 방지하기 위한 하드웨어
RAMAMURTHI BADRI N, ROCHA ALVAREZ JUAN CARLOS, NGUYEN TUAN A, PATHAK NITIN, BANSAL AMIT, RUBIO THOMAS
Year of Publication 21.11.2023
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Year of Publication 21.11.2023
Patent
스로틀 밸브 드리프트를 감소시키기 위한 능동 냉각포어라인 트랩
ROCHA ALVAREZ JUAN CARLOS, NGUYEN TUAN A, JANAKIRAMAN KARTHIK, BANSAL AMIT, FU GAOSHENG
Year of Publication 01.08.2023
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Year of Publication 01.08.2023
Patent
기생 플라즈마 형성을 수용하기 위한 반도체 프로세싱 챔버
ROCHA ALVAREZ JUAN CARLOS, FISCHBACH ADAM J, TANAKA TSUTOMU, PAUL KHOKAN CHANDRA, KANGUDE ABHIJIT A
Year of Publication 19.06.2023
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Year of Publication 19.06.2023
Patent
다중 프로세스 반도체 프로세싱 시스템
RAMAMURTHI BADRI N, ROCHA ALVAREZ JUAN CARLOS, PATHAK NITIN, PRABHAKAR VINAY K, KALSEKAR VIREN
Year of Publication 21.03.2023
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Year of Publication 21.03.2023
Patent
SHOWERHEAD ASSEMBLY WITH MULTIPLE FLUID DELIVERY ZONES
ROCHA ALVAREZ JUAN CARLOS, KIM SAM H, BALUJA SANJEEV, NGUYEN TUAN ANH, BANSAL AMIT KUMAR
Year of Publication 19.01.2023
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Year of Publication 19.01.2023
Patent
반도체 프로세싱 시스템을 위한 최하부 퍼지
RAMAMURTHI BADRI N, ROCHA ALVAREZ JUAN CARLOS, NGUYEN TUAN A, PATHAK NITIN, PRABHAKAR VINAY, KALSEKAR VIREN
Year of Publication 13.12.2022
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Year of Publication 13.12.2022
Patent
PLASMA CORROSION RESISTIVE HEATER FOR HIGH TEMPERATURE PROCESSING
ROCHA ALVAREZ JUAN CARLOS, DUAN REN GUAN, KHAJA ABDUL AZIZ, BANSAL AMIT KUMAR, ZHOU JIANHUA
Year of Publication 05.10.2022
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Year of Publication 05.10.2022
Patent
반도체 프로세싱을 위한 높은 열 손실 히터 및 정전 척
ROCHA ALVAREZ JUAN CARLOS, BRILLHART PAUL L, WOO KATHERINE, SRINIVASAMURTHY VIDYADHARAN, ZHANG WENHAO, LI JIAN, KULKARNI MAYUR GOVIND
Year of Publication 21.06.2023
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Year of Publication 21.06.2023
Patent
기판 프로세싱 챔버들을 위한 아이솔레이터 장치 및 방법들
RAMAMURTHI BADRI N, ROCHA ALVAREZ JUAN CARLOS, PATHAK NITIN, NGUYEN TUAN ANH, BANSAL AMIT KUMAR, RUBIO THOMAS
Year of Publication 08.03.2022
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Year of Publication 08.03.2022
Patent
정밀 유체 전달을 위한 열적으로 안정적인 유량계들
ALAM SYED, ROCHA ALVAREZ JUAN CARLOS, JORAPUR NIKHIL SUDHINDRARAO, BENJAMIN RAJ DAEMIAN RAJ, SRIVASTAVA SHAILENDRA
Year of Publication 02.11.2020
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Year of Publication 02.11.2020
Patent
정전 척을 위한 전력 공급 신호 컨디셔닝
DZILNO DMITRY A, ROCHA ALVAREZ JUAN CARLOS, KAMATH SANJAY G, ENSLOW KRISTOPHER R, RAJ DAEMIAN RAJ BENJAMIN, KESHRI ABHIGYAN, HOWLADER RANA, SRIVASTAVA SHAILENDRA, HAMMOND EDWARD P, PADHI DEENESH, YE ZHENG JOHN, HAN XINHAI
Year of Publication 31.05.2023
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Year of Publication 31.05.2023
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HIGH TEMPERATURE ELECTROSTATIC CHUCKING WITH DIELECTRIC CONSTANT ENGINEERED IN-SITU CHARGE TRAP MATERIALS
BEHERA SWAYAMBHU PRASAD, KULSHRESHTHA PRASHANT KUMAR, ROCHA ALVAREZ JUAN CARLOS, LEE KWANGDUK DOUGLAS, CHEN JIAN J, BALASUBRAMANIAN GANESH, KIM BOK HOEN, YE ZHENG JOHN
Year of Publication 03.05.2022
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Year of Publication 03.05.2022
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