Moisture resistance of plasma enhanced chemical vapor deposited oxides used for ultralarge scale integrated device applications
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Conference Proceeding
Journal Article
Gap fill and film reflow capability of subatmospheric chemical vapor deposited borophosphosilicate glass
ROBLES, S, RUSSELL, K, GALIANO, M, SIVA, V, KITHCART, V, NGUYEN, B. C
Published in Journal of the Electrochemical Society (01.04.1996)
Published in Journal of the Electrochemical Society (01.04.1996)
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Journal Article
Verfahren und Vorrichtung zur chemischen Gasphasenabscheidung dünner Schichten
ROBLES, STUARDO, GALIANO, MARIA, KITHCART, VICTORIA, SIVARAMAKRISHNAN, VISWESWAREN
Year of Publication 27.10.2005
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Year of Publication 27.10.2005
Patent
Method and apparatus for thin films formation by CVD
ROBLES, STUARDO, GALIANO, MARIA, KITHCART, VICTORIA, SIVARAMAKRISHNAN, VISWESWAREN
Year of Publication 03.11.2004
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Year of Publication 03.11.2004
Patent
Apparatus for creating strong interface between in-situ SACVD and PECVD silicon oxide films
KITHCART; VICTORIA, SIVARAMAKRISHNAN; VISWESWAREN, GALIANO; MARIA, ROBLES; STUARDO
Year of Publication 04.01.2000
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Year of Publication 04.01.2000
Patent
Chemical vapor deposition reactor system and integrated circuit
RUSSELL; KATHLEEN, SIVARAMAKRISHNAN; VISWESWAREN, NGUYEN; BANG C, ROBLES; STUARDO
Year of Publication 15.07.1997
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Year of Publication 15.07.1997
Patent
Method and apparatus for thin films formation by CVD
ROBLES, STUARDO, GALIANO, MARIA, KITHCART, VICTORIA, SIVARAMAKRISHNAN, VISWESWAREN
Year of Publication 11.06.1997
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Year of Publication 11.06.1997
Patent
Apparatus for improving film stability of halogen-doped silicon oxide films
GUPTA ANAND, VERMA AMRITA, LEE PETER W, ROBLES STUARDO, RANA VIRENDRA V. S
Year of Publication 23.04.2002
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Year of Publication 23.04.2002
Patent