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"ROBERT M GEFFKEN"
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"ROBERT M GEFFKEN"
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ADJUSTABLE SELF-ALIGNED AIR GAP DIELECTRIC FOR LOW CAPACITANCE WIRING
by
GEFFKEN
,
ROBERT
,
M
,
MOTSIFF, WILLIAM, T
Year of Publication
29.02.2012
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Dual damascene integration structure and method for forming improved dual damascene integration structure
by
GEFFKEN ROBERT M
,
HAUTALA JOHN J
Year of Publication
20.07.2010
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Dual damascene integration structure and method for forming improved dual damascene integration structure
by
Geffken
,
Robert M
,
Hautala, John J
Year of Publication
20.07.2010
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Adjustable self-aligned air gap dielectric for low capacitance wiring
by
GEFFKEN ROBERT M
,
MOTSIFF WILLIAM T
Year of Publication
15.04.2008
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Adjustable self-aligned air gap dielectric for low capacitance wiring
by
Geffken
,
Robert M
,
Motsiff, William T
Year of Publication
15.04.2008
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ADJUSTABLE SELF-ALIGNED AIR GAP DIELECTRIC FOR LOW CAPACITANCE WIRING
by
GEFFKEN
,
ROBERT
,
M
,
MOTSIFF, WILLIAM, T
Year of Publication
09.05.2007
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Metal spacer in single and dual damascene processing
by
STAMPER ANTHONY K
,
COONEY, III EDWARD C
,
GEFFKEN ROBERT M
Year of Publication
02.02.2010
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Metal spacer in single and dual damascene processing
by
Cooney, III, Edward C
,
Geffken
,
Robert M
,
Stamper, Anthony K
Year of Publication
02.02.2010
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IMPROVED DUAL DAMASCENE INTEGRATION STRUCTURES AND METHOD OF FORMING IMPROVED DUAL DAMASCENE INTEGRATION STRUCTURES
by
HAUTALA, JOHN, J
,
GEFFKEN
,
ROBERT
,
M
Year of Publication
07.03.2007
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IMPROVED DUAL DAMASCENE INTEGRATION STRUCTURES AND METHOD OF FORMING IMPROVED DUAL DAMASCENE INTEGRATION STRUCTURES
by
HAUTALA, JOHN, J
,
GEFFKEN
,
ROBERT
,
M
Year of Publication
09.11.2006
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Adjustable self-aligned air gap dielectric for low capacitance wiring
by
GEFFKEN ROBERT M
.,MOTSIFF WILLIAM T
Year of Publication
01.11.2006
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Adjustable self-aligned air gap dielectric for low capacitance wiring
by
GEFFKEN ROBERT M
,
MOTSIFF WILLIAM T
Year of Publication
14.09.2006
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Adjustable self-aligned air gap dielectric for low capacitance wiring
by
Geffken
,
Robert M
,
Motsiff, William T
Year of Publication
04.07.2006
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Adjustable self-aligned air gap dielectric for low capacitance wiring
by
GEFFKEN ROBERT M
,
MOTSIFF WILLIAM T
Year of Publication
04.07.2006
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ADJUSTABLE SELF-ALIGNED AIR GAP DIELECTRIC FOR LOW CAPACITANCE WIRING
by
GEFFKEN ROBERT M
,
MOTSIFF WILLIAM T
Year of Publication
27.06.2006
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ADJUSTABLE SELF-ALIGNED AIR GAP DIELECTRIC FOR LOW CAPACITANCE WIRING
by
GEFFKEN
,
ROBERT
,
M
,
MOTSIFF, WILLIAM, T
Year of Publication
14.06.2006
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IMPROVED DUAL DAMASCENE INTEGRATION STRUCTURES AND METHOD OF FORMING IMPROVED DUAL DAMASCENE INTEGRATION STRUCTURES
by
HAUTALA, JOHN, J
,
GEFFKEN
,
ROBERT
,
M
Year of Publication
22.12.2005
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Dual damascene integration structure and method for forming improved dual damascene integration structure
by
GEFFKEN ROBERT M
,
HAUTALA JOHN J
Year of Publication
08.12.2005
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METAL SPACER IN SINGLE AND DUAL DAMASCENE PROCESSING
by
STAMPER ANTHONY K
,
COONEY, III EDWARD C
,
GEFFKEN ROBERT M
Year of Publication
27.11.2008
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ADJUSTABLE SELF-ALIGNED AIR GAP DIELECTRIC FOR LOW CAPACITANCE WIRING
by
GEFFKEN
,
ROBERT
,
M
,
MOTSIFF, WILLIAM, T
Year of Publication
29.09.2005
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