SILICON IMPLANTATION IN SUBSTRATE AND PROVISION OF SILICON PRECURSOR COMPOSITION THEREFOR
ROBERT KAIM, JAMES J MAYER, RICHARD S MAYER, SHARAD N YEDAVE, TANG YING, JOSEPH D SWEENEY, CHEN TIANNIU, OLEG BYL
Year of Publication 08.08.2019
Get full text
Year of Publication 08.08.2019
Patent
ION SOURCE CLEANING IN SEMICONDUCTOR PROCESSING SYSTEMS
ROBERT KAIM, DAVID ELDRIDGE, SHARAD N YEDAVE, HOLLANDER W CARL, FENG LIN, TANG YING, STEVEN SERGI, SWEENEY JOSEPH D, OLEG BYL, STEVEN E BISHOP
Year of Publication 05.02.2015
Get full text
Year of Publication 05.02.2015
Patent
Decreasing Beam Auto Tuning Interruption Events with In-Situ Chemical Cleaning on Axcelis GSD
Fuchs, Dieter, Spreitzer, Stefan, Vogl, Josef, Bishop, Steve, Eldridge, David, Kaim, Robert
Published in AIP conference proceedings (01.01.2008)
Published in AIP conference proceedings (01.01.2008)
Get full text
Journal Article
Development of 'Static' In-Situ Implanter Chamber Cleaning
Yedave, Sharad, Sweeney, Joe, Byl, Oleg, Letaj, Shkelqim, Wodjenski, Mike, Hilgarth, Monica, Marganski, Paul, Bishop, Steve, Eldridge, David, Kaim, Robert
Published in Ion Implantation Technology 2008 (01.01.2008)
Published in Ion Implantation Technology 2008 (01.01.2008)
Get full text
Journal Article
Optimization of Xenon Difluoride Vapor Delivery
Sweeney, Joseph, Marganski, Paul, Kaim, Robert, Wodjenski, Mike, Gregg, John, Yedave, Sharad, Sergi, Steve, Bishop, Steve, Eldridge, David, Zou, Peng
Published in AIP conference proceedings (01.01.2008)
Published in AIP conference proceedings (01.01.2008)
Get full text
Journal Article