Process kit components for titanium sputtering chamber
SCHEIBLE KATHLEEN A, RITCHIE ALAN ALEXANDER, HONG ILYOUNG (RICHARD), YOUNG DONNY
Year of Publication 29.07.2014
Get full text
Year of Publication 29.07.2014
Patent
Target for sputtering chamber
SCHEIBLE KATHLEEN A, KELKAR UMESH, RITCHIE ALAN ALEXANDER, HONG ILYOUNG (RICHARD), YOUNG DONNY
Year of Publication 11.02.2014
Get full text
Year of Publication 11.02.2014
Patent
TARGET FOR SPUTTERING CHAMBER AND PROCESS KIT COMPONENT
SCHEIBLE KATHLEEN A, KELKAR UMESH, HONG ILYOUNG RICHARD, RITCHIE ALAN ALEXANDER, DONNY YOUNG
Year of Publication 14.06.2007
Get full text
Year of Publication 14.06.2007
Patent
TARGET AND PROCESS KIT COMPONENTS FOR SPUTTERING CHAMBER
SCHEIBLE KATHLEEN A, KELKAR UMESH, RITCHIE ALAN ALEXANDER, HONG LLYOUNG(RICHARD), YOUNG DONNY
Year of Publication 30.05.2007
Get full text
Year of Publication 30.05.2007
Patent
Target and process kit components for sputtering chamber
KELKAR, UMESH, HONG, ILYOUNG RICHARD, RITCHIE, ALAN ALEXANDER, YOUNG DONNY, SCHEIBLE, KATHLEEN A
Year of Publication 21.07.2012
Get full text
Year of Publication 21.07.2012
Patent
Process kit component for sputtering chamber
SCHEIBLE KATHLEEN A, KELKAR UMESH, HONG ILYOUNG RICHARD, RITCHIE ALAN ALEXANDER, DONNY YOUNG
Year of Publication 08.06.2011
Get full text
Year of Publication 08.06.2011
Patent
Target and process kit components for sputtering chamber
SCHEIBLE KATHLEEN A, KELKAR UMESH, HONG LLYOUNG RICHARD, RITCHIE ALAN ALEXANDER, YOUNG DONNY
Year of Publication 06.04.2011
Get full text
Year of Publication 06.04.2011
Patent