ALD of Metal Fluorides–Potential Applications and Current State
Atosuo, Elisa, Mäntymäki, Miia, Ritala, Mikko
Published in Advanced materials interfaces (15.10.2024)
Published in Advanced materials interfaces (15.10.2024)
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Journal Article
Precursors as enablers of ALD technology: Contributions from University of Helsinki
Hatanpää, Timo, Ritala, Mikko, Leskelä, Markku
Published in Coordination chemistry reviews (01.12.2013)
Published in Coordination chemistry reviews (01.12.2013)
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Journal Article
Needleless electrospinning with twisted wire spinneret
Holopainen, Jani, Penttinen, Toni, Santala, Eero, Ritala, Mikko
Published in Nanotechnology (16.01.2015)
Published in Nanotechnology (16.01.2015)
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Journal Article
Introducing atomic layer epitaxy for the deposition of optical thin films
Riihelä, Diana, Ritala, Mikko, Matero, Raija, Leskelä, Markku
Published in Thin solid films (30.11.1996)
Published in Thin solid films (30.11.1996)
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Journal Article
Influence of thickness and growth temperature on the properties of zirconium oxide films grown by atomic layer deposition on silicon
Kukli, Kaupo, Ritala, Mikko, Uustare, Teet, Aarik, Jaan, Forsgren, Katarina, Sajavaara, Timo, Leskelä, Markku, Hårsta, Anders
Published in Thin solid films (01.05.2002)
Published in Thin solid films (01.05.2002)
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Journal Article
Substrate-Dependent Area-Selective Atomic Layer Deposition of Noble Metals from Metal β‑Diketonate Precursors
Zhang, Chao, Tois, Eva, Leskelä, Markku, Ritala, Mikko
Published in Chemistry of materials (27.09.2022)
Published in Chemistry of materials (27.09.2022)
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Journal Article
Atomic Layer Deposition of PbI 2 Thin Films
Popov, Georgi, Mattinen, Miika, Hatanpää, Timo, Vehkamäki, Marko, Kemell, Marianna, Mizohata, Kenichiro, Räisänen, Jyrki, Ritala, Mikko, Leskelä, Markku
Published in Chemistry of materials (12.02.2019)
Published in Chemistry of materials (12.02.2019)
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Journal Article
Inherent area-selective atomic layer deposition of ZnS
Zhang, Chao, Vehkamäki, Marko, Leskelä, Markku, Ritala, Mikko
Published in Dalton transactions : an international journal of inorganic chemistry (18.07.2023)
Published in Dalton transactions : an international journal of inorganic chemistry (18.07.2023)
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Journal Article
Adhesion and mechanical properties of nanocrystalline hydroxyapatite coating obtained by conversion of atomic layer-deposited calcium carbonate on titanium substrate
Avila, Inari, Pantchev, Konstantin, Holopainen, Jani, Ritala, Mikko, Tuukkanen, Juha
Published in Journal of materials science. Materials in medicine (01.08.2018)
Published in Journal of materials science. Materials in medicine (01.08.2018)
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Journal Article
A low-temperature thermal ALD process for nickel utilizing dichlorobis(triethylphosphine)nickel() and 1,4-bis(trimethylgermyl)-1,4-dihydropyrazine
Vihervaara, Anton, Hatanpää, Timo, Mizohata, Kenichiro, Chundak, Mykhailo, Popov, Georgi, Ritala, Mikko
Published in Dalton transactions : an international journal of inorganic chemistry (26.07.2022)
Published in Dalton transactions : an international journal of inorganic chemistry (26.07.2022)
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Journal Article
Atomic Layer Deposition of Emerging 2D Semiconductors, HfS2 and ZrS2, for Optoelectronics
Mattinen, Miika, Popov, Georgi, Vehkamäki, Marko, King, Peter J, Mizohata, Kenichiro, Jalkanen, Pasi, Räisänen, Jyrki, Leskelä, Markku, Ritala, Mikko
Published in Chemistry of materials (13.08.2019)
Published in Chemistry of materials (13.08.2019)
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Journal Article
HfO[sub 2] Films Grown by ALD Using Cyclopentadienyl-Type Precursors and H[sub 2]O or O[sub 3] as Oxygen Source
Niinistö, Jaakko, Putkonen, Matti, Niinistö, Lauri, Arstila, Kai, Sajavaara, Timo, Lu, Jun, Kukli, Kaupo, Ritala, Mikko, Leskelä, Markku
Published in Journal of the Electrochemical Society (2006)
Published in Journal of the Electrochemical Society (2006)
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Journal Article
Atomic layer deposition of CoF 2 , NiF 2 and HoF 3 thin films
Atosuo, Elisa, Mäntymäki, Miia, Pesonen, Leevi, Mizohata, Kenichiro, Hatanpää, Timo, Leskelä, Markku, Ritala, Mikko
Published in Dalton transactions : an international journal of inorganic chemistry (08.08.2023)
Published in Dalton transactions : an international journal of inorganic chemistry (08.08.2023)
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Journal Article