RF 챔버들에 대한 개선된 애노드-캐소드 비를 위한 장치
RIKER MARTIN LEE, KENCHAPPA CHANDRASHEKAR, MILLER KEITH A, YEDLA SRINIVASA RAO, SAVANDAIAH KIRANKUMAR NEELASANDRA
Year of Publication 21.02.2023
Get full text
Year of Publication 21.02.2023
Patent
간격 보상을 사용하여 타깃 수명에 걸친 기판 온도 불균일성 감소
RIKER MARTIN LEE, PETHE SHIRISH A, RAO PREETHAM, ZHANG FUHONG, KALATHIPARAMBIL KISHOR KUMAR, ZHONG LANLAN, BANGALORE UMESH SUHAS
Year of Publication 17.10.2023
Get full text
Year of Publication 17.10.2023
Patent
반도체 프로세싱 중에 자기장들을 형성하기 위한 방법들
SAMANT SUSHIL ARUN, YOSHIDOME GOICHI, RIKER MARTIN LEE, PETHE SHIRISH A, ZHANG FUHONG, KALATHIPARAMBIL KISHOR KUMAR, LEI WEI, KOTHNUR PRASHANTH, TOMKO ANDREW, BANGALORE UMESH SUHAS
Year of Publication 01.02.2024
Get full text
Year of Publication 01.02.2024
Patent
기판을 프로세싱하기 위한 방법들 및 장치
TANG XIANMIN, RIKER MARTIN LEE, PETHE SHIRISH A, ZHANG FUHONG, CONNORS PAUL DENNIS, LO LEWIS YUAN TSE, ZHONG LANLAN, XIE XIANGJIN
Year of Publication 16.03.2023
Get full text
Year of Publication 16.03.2023
Patent
METHODS AND APPARATUS FOR CONTROLLING ION FRACTION IN PHYSICAL VAPOR DEPOSITION PROCESSES
TANG XIANMIN, ZHANG SHOUYIN, RIKER MARTIN LEE, WANG RONGJUN, ZHANG FUHONG, MILLER KEITH A, LEE JOUNG JOO, WANG XIAODONG, FRUCHTERMAN WILLIAM, ALLEN ADOLPH MILLER
Year of Publication 05.01.2021
Get full text
Year of Publication 05.01.2021
Patent
COOLED PROCESS TOOL ADAPTER FOR USE IN SUBSTRATE PROCESSING CHAMBERS
INFANTE ANTHONY, RIKER MARTIN LEE, MILLER KEITH A, FRUCHTERMAN WILLIAM R
Year of Publication 10.02.2017
Get full text
Year of Publication 10.02.2017
Patent
물리 기상 증착 프로세스들에서 이온 프랙션을 제어하기 위한 방법들 및 장치
TANG XIANMIN, ZHANG SHOUYIN, RIKER MARTIN LEE, WANG RONGJUN, ZHANG FUHONG, MILLER KEITH A, LEE JOUNG JOO, WANG XIAODONG, FRUCHTERMAN WILLIAM, ALLEN ADOLPH MILLER
Year of Publication 17.10.2018
Get full text
Year of Publication 17.10.2018
Patent
PHYSICAL VAPOR DEPOSITION (PVD) TARGET HAVING LOW FRICTION PADS
RIKER MARTIN LEE, MILLER KEITH A, PAI UDAY, SAVANDAIAH KIRANKUMAR, RASHEED MUHAMMAD M, FRUCHTERMAN WILLIAM, NGUYEN THANH X
Year of Publication 24.08.2016
Get full text
Year of Publication 24.08.2016
Patent