멀티-빔 대전 입자 시스템 및 멀티-빔 대전 입자 시스템에서 작동 거리를 제어하는 방법
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Year of Publication 22.01.2024
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Year of Publication 13.09.2024
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Year of Publication 22.09.2023
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Year of Publication 27.09.2022
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Year of Publication 27.09.2022
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Year of Publication 17.11.2022
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Year of Publication 17.11.2022
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입자 현미경을 사용하여 영상을 기록하는 방법
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Year of Publication 11.06.2021
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Year of Publication 08.06.2021
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Year of Publication 08.06.2021
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Multi-beam charged particle microscope, method of determining a plurality of wave-front aberration amplitudes of a multi-beam charged particle microscope, method of compensating a plurality of wave-front aberrations of a multi-beam charged particle microscope at a setting point, method of calibrating a charged particle optical element of a multi-beam charged particle microscope, and method of determining a wavefront aberration of each beamlet of a plurality of primary charged particle beamlet of
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PARTICLE BEAM SYSTEM AND METHOD FOR OPERATING A PARTICLE OPTICAL UNIT
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Year of Publication 16.12.2015
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Year of Publication 16.12.2015
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