Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
GROBELNY THOMAS J, CHEN HUNG NAN, HUIBERS ANDREW G, CHIANG STEVE, DEHLINGER DIETRICH, SUN ANTHONY, DUBOC ROBERT M, RICHARDS PETER W, PATEL SATAYADEV R, SHI HONGQIN
Year of Publication 11.12.2007
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Year of Publication 11.12.2007
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MICROMIRROR ELEMENTS, PACKAGE FOR THE MICROMIRROR ELEMENTS, AND PROTECTION SYSTEM THEREFOR
PATEL, SATYADEV, HUIBERS, ANDREW, G, ILKOV, FEDOR, STOCKTON, JOHN, RICHARDS, PETER, W
Year of Publication 04.06.2003
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Year of Publication 04.06.2003
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Projection system and mirror elements for improved contrast ratio in spatial light modulators
Ilkov, Fedor A, Patel, Satyadev R, Richards, Peter W, Stockton, John K
Year of Publication 25.02.2003
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Year of Publication 25.02.2003
Patent
MICROMIRROR ELEMENTS, PACKAGE FOR THE MICROMIRROR ELEMENTS, AND PROTECTION SYSTEM THEREFOR
PATEL, SATYADEV, HUIBERS, ANDREW, G, ILKOV, FEDOR, STOCKTON, JOHN, RICHARDS, PETER, W
Year of Publication 06.09.2002
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Year of Publication 06.09.2002
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Micromirror elements, package for the micromirror elements, and protection system therefor
SATYADEV PATEL, ANDREW G. HUIBERS, JOHN STOCKTON, FEDOR ILKOV, PETER W. RICHARDS
Year of Publication 18.02.2002
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Year of Publication 18.02.2002
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MICROMIRROR ELEMENTS, PACKAGE FOR THE MICROMIRROR ELEMENTS, AND PROTECTION SYSTEM THEREFOR
PATEL, SATYADEV, HUIBERS, ANDREW, G, ILKOV, FEDOR, STOCKTON, JOHN, RICHARDS, PETER, W
Year of Publication 14.02.2002
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Year of Publication 14.02.2002
Patent
Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
GROBELNY THOMAS J, CHEN HUNG NAN, HUIBERS ANDREW G, CHIANG STEVE, DEHLINGER DIETRICH, SUN ANTHONY, DUBOC ROBERT M, RICHARDS PETER W, PATEL SATAYADEV R, SHI HONGQIN
Year of Publication 07.04.2005
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Year of Publication 07.04.2005
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