INTERNAL PLASMA GRID FOR SEMICONDUCTOR FABRICATION
RICHARD A MARSH, SARAVANAPRIYAN SRIRAMAN, ALEX PATERSON, VAHID VAHEDI, SINGH HARMEET, THORSTEN LILL, WU YING
Year of Publication 27.10.2014
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Year of Publication 27.10.2014
Patent
Electrochemical stability of copper in lithium-ion battery electrolytes
MINGCHUAN ZHAO, KARIUKI, S, DEWALD, H. D, LEMKE, F. R, STANIEWICZ, R. J, PLICHTA, E. J, MARSH, R. A
Published in Journal of the Electrochemical Society (01.08.2000)
Published in Journal of the Electrochemical Society (01.08.2000)
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Journal Article
Systems for cooling RF heated chamber components
Sriraman, Saravanapriyan, Marsh, Richard A, Holland, John, McChesney, Jon, Paterson, Alexander Miller
Year of Publication 30.01.2024
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Year of Publication 30.01.2024
Patent
SYSTEMS FOR COOLING RF HEATED CHAMBER COMPONENTS
MARSH, Richard A, HOLLAND, John, MCCHESNEY, Jon, PATERSON, Alexander Miller, SRIRAMAN, Saravanapriyan
Year of Publication 09.02.2023
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Year of Publication 09.02.2023
Patent
Systems for cooling RF heated chamber components
Sriraman, Saravanapriyan, Marsh, Richard A, Holland, John, McChesney, Jon, Paterson, Alexander Miller
Year of Publication 08.11.2022
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Year of Publication 08.11.2022
Patent
SYSTEMS FOR COOLING RF HEATED CHAMBER COMPONENTS
MARSH, Richard A, HOLLAND, John, MCCHESNEY, Jon, PATERSON, Alexander Miller, SRIRAMAN, Saravanapriyan
Year of Publication 18.02.2021
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Year of Publication 18.02.2021
Patent
Systems for cooling RF heated chamber components
Sriraman, Saravanapriyan, Marsh, Richard A, Holland, John, McChesney, Jon, Paterson, Alexander Miller
Year of Publication 03.11.2020
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Year of Publication 03.11.2020
Patent
Detektion von Kühlmittelverlust und Abhilfemaßnahme bei einem Batteriestapel mit Flüssigkühlung
Marsh, Richard A, Skelton, Scott M, Singh, Kulwinder, Parks, Douglas L
Year of Publication 30.11.2023
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Year of Publication 30.11.2023
Patent
Verfahren zum Aufladen einer Batterie eines elektrischen Systems und elektrisches System
Newhouse, Vernon L, Marsh, Richard A, Groshek, Paul G, Johnson, Carol L
Year of Publication 17.08.2023
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Year of Publication 17.08.2023
Patent
SYSTEMS FOR COOLING RF HEATED CHAMBER COMPONENTS
MARSH, Richard A, HOLLAND, John, MCCHESNEY, Jon, PATERSON, Alexander Miller, SRIRAMAN, Saravanapriyan
Year of Publication 30.08.2018
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Year of Publication 30.08.2018
Patent
Bipolar lithium-ion battery development
Marsh, Richard A., Russell, Philip G., Reddy, Thomas B.
Published in Journal of power sources (01.03.1997)
Published in Journal of power sources (01.03.1997)
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Journal Article
Conference Proceeding
INTERNAL PLASMA GRID FOR SEMICONDUCTOR FABRICATION
SINGH, Harmeet, LILL, Thorsten, WU, Ying, MARSH, Richard A, PATERSON, Alex, VAHEDI, Vahid, SRIRAMAN, Saravanapriyan
Year of Publication 29.11.2017
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Year of Publication 29.11.2017
Patent
INTERNAL PLASMA GRID FOR SEMICONDUCTOR FABRICATION
MARSH RICHARD A, LILL THORSTEN, SRIRAMAN SARAVANAPRIYAN, SINGH HARMEET, PATERSON ALEX
Year of Publication 19.05.2016
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Year of Publication 19.05.2016
Patent