TiN/TiSi2 formation using TiNx layer and its feasibilities in ULSI
JEONG SOO BYUN, CHANG REOL KIM, KWAN GOO RHA, JAE JEONG KIM, WOO SHIK KIM
Published in Japanese journal of applied physics (1995)
Published in Japanese journal of applied physics (1995)
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Conference Proceeding
SURFACE PLASMON RESONANCE SENSOR SYSTEM
KIM, YONG KYU, PARK, HYUN KYU, CHUNG, BONG HYUN, SHIN, YONG BEOM, JEON, BU IL, RHA, KWAN GOO
Year of Publication 15.03.2012
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Year of Publication 15.03.2012
Patent
Annealing effects of polycrystalline silicon gate on electrical properties of thin gate oxide
Cho, Won-Ju, Kim, Eung-Soo, Kang, Jun-Jin, Rha, Kwan-Goo, Kim, Hong-Seok
Published in Solid-state electronics (01.04.1998)
Published in Solid-state electronics (01.04.1998)
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Journal Article
Apparatus for supporting substrate and plasma etching apparatus having the same
RHA KWAN GOO, KIM DONG WAN, LEE HYANG JOO, JANG CHUL HEE, LEE JUNG HEE, LEE WON HAENG
Year of Publication 17.03.2015
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Year of Publication 17.03.2015
Patent