Apparatus for plasma processing and method for plasma processing
LEE, JUNG HEE, CHUNG, SENG HYUN, JEON, SUN Q, HAN, YOUNG KI, LEE, HEE SE, RHA, KWAN GOO, LEE, KYUNG HO, GUAHK, JAE HO, LIM, YONG HWAN, CHOI, JAE CHUL
Year of Publication 01.09.2017
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Year of Publication 01.09.2017
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APPARATUS FOR SUPPORTING A SUBSTRATE AND EQUIPMENT FOR ETCHING SUBSTRATE EDGE HAVING THE SAME
LEE, JUNG HEE, LEE, WON HAENG, JANG, CHUL HEE, LEE, HYANG JOO, KIM, DONG WAN, RHA, KWAN GOO
Year of Publication 21.11.2008
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Year of Publication 21.11.2008
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APPARATUS FOR PLASMA TREATMENT
LEE, JUNG HEE, HAN, YOUNG KI, RHA, KWAN GOO, LEE, KYUNG HO, CHOI, JAE CHUL
Year of Publication 16.10.2008
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Year of Publication 16.10.2008
Patent
APPARATUS FOR SUPPORTING SUBSTRATE AND PLASMA ETCHING APPARATUS HAVING THE SAME
LEE, JUNG HEE, LEE, WON HAENG, JANG, CHUL HEE, LEE, HYANG JOO, KIM, DONG WAN, RHA, KWAN GOO
Year of Publication 09.10.2008
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Year of Publication 09.10.2008
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METHOD OF ETCHING A WAFER USING A PLASMA ETCHING EQUIPMENT
LEE, HYANG JU, LEE, JUNG HEE, CHAE, MUN SIK, LEE, CHANG BAE, RHA, KWAN GOO, KIM, HAK CHAN, LIM, YONG HWAN
Year of Publication 15.12.2009
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Year of Publication 15.12.2009
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Plasma etching equipment and method of etching a wafer
LEE, JUNG HEE, LEE, GIL HUN, JANG, CHUL HEE, HAN, YOUNG KI, RHA, KWAN GOO
Year of Publication 01.02.2015
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Year of Publication 01.02.2015
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APPARATUS FOR PLASMA TREATMENT AND THE PLASMA-TREATING METHOD USING IT
JEON, SUN Q, HAN, YOUNG KI, LEE, HEE SE, RHA, KWAN GOO, GUAHK, JAE HO
Year of Publication 19.09.2008
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Year of Publication 19.09.2008
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APPARATUS AND METHOD OF PROCESSING SUBSTRATES
JEON, SEON-KYU, RHA, KWAN-GOO, LEE, HEE-SE, LEE, JUNG-HEE, CHUNG, SENG-HYUN, KIM, GEUN-HO
Year of Publication 12.09.2008
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Year of Publication 12.09.2008
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APPARATUS FOR PLASMA PROCESSING AND METHOD FOR PLASMA PROCESSING
RHA KWAN GOO, CHOI JAE, GUAHK JAE HO, JEON SUN Q, LIM YONG HWAN, LEE HEE SE, LEE JUNG HEE, HAN YOUNG KI, LEE KYUNG HO, CHUNG SENG HYUN
Year of Publication 11.03.2010
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Year of Publication 11.03.2010
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APPARATUS FOR FORMING A LAYER
LEE, KWANG-HEE, RHA, KWAN-GOO, LEE, HEE-SE, YUN, SOO-WON, PARK, SEUNG-IL, KIM, GEUN-HO
Year of Publication 14.08.2008
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Year of Publication 14.08.2008
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Apparatus for supporting substrate and plasma etching apparatus having the same
LEE, JUNG HEE, LEE, WON HAENG, JANG, CHUL HEE, LEE, HYANG JOO, KIM, DONG WAN, RHA, KWAN GOO
Year of Publication 01.08.2013
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Year of Publication 01.08.2013
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Apparatus and method of processing substrates
JEON, SEON-KYU, RHA, KWAN-GOO, LEE, HEE-SE, LEE, JUNG-HEE, CHUNG, SENG-HYUN, KIM, GEUN-HO
Year of Publication 21.05.2014
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Year of Publication 21.05.2014
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APPARATUS FOR PLASMA PROCESSING AND METHOD FOR PLASMA PROCESSING
LEE, JUNG HEE, CHUNG, SENG HYUN, JEON, SUN Q, HAN, YOUNG KI, LEE, HEE SE, RHA, KWAN GOO, LEE, KYUNG HO, GUAHK, JAE HO, LIM, YONG HWAN, CHOI, JAE CHUL
Year of Publication 25.09.2008
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Year of Publication 25.09.2008
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Apparatus for forming a layer
LEE, KWANG-HEE, RHA, KWAN-GOO, LEE, HEE-SE, YUN, SOO-WON, PARK, SEUNG-IL, KIM, GEUN-HO
Year of Publication 21.01.2014
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Year of Publication 21.01.2014
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Showerhead apparatus for radical-assisted deposition
Kim, Jae Ho, Shin, In Chel, Park, Sang Joon, Rha, Kwan Goo, Kim, Sang Ho
Year of Publication 20.08.2002
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Year of Publication 20.08.2002
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Surface plasmon resonance sensor system
RHA, KWAN-GOO, CHUNG, BONG-HYUN, JEON, BU-IL, PARK, HYUN-KYU, KIM, YONG-KYU, SHIN, YONG-BEOM
Year of Publication 16.04.2013
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Year of Publication 16.04.2013
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Enhanced EM endurance of TiN/AlCu/TiN/sub x/ interconnection
Jeong Soo Byun, Jun Ki Kim, Kwan Goo Rha, Woo Shik Kim
Published in Proceedings of 1994 IEEE International Integrated Reliability Workshop (IRWS) (1994)
Published in Proceedings of 1994 IEEE International Integrated Reliability Workshop (IRWS) (1994)
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Conference Proceeding
Gas supplying apparatus and equipment for etching substrate edge having the same
RHA, KWAN-GOO, KIM, DONG-WAN, LEE, JUNG-HEE, JANG, CHUL-HEE, LEE, HYANG-JOO
Year of Publication 01.03.2009
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Year of Publication 01.03.2009
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