Fundamental aspects of substrate biasing: ion velocity distributions and nonlinear effects
Baloniak, Tim, Reuter, Rüdiger, von Keudell, Achim
Published in Journal of physics. D, Applied physics (25.08.2010)
Published in Journal of physics. D, Applied physics (25.08.2010)
Get full text
Journal Article
Insight into the Reaction Scheme of SiO2 Film Deposition at Atmospheric Pressure
Rügner, Katja, Reuter, Rüdiger, Ellerweg, Dirk, de los Arcos, Teresa, von Keudell, Achim, Benedikt, Jan
Published in Plasma processes and polymers (01.12.2013)
Published in Plasma processes and polymers (01.12.2013)
Get full text
Journal Article
Removal of Model Proteins Using Beams of Argon Ions, Oxygen Atoms and Molecules: Mimicking the Action of Low-Pressure Ar/O2 ICP Discharges
Kylián, Ondřej, Benedikt, Jan, Sirghi, Lucel, Reuter, Rüdiger, Rauscher, Hubert, von Keudell, Achim, Rossi, François
Published in Plasma processes and polymers (03.04.2009)
Published in Plasma processes and polymers (03.04.2009)
Get full text
Journal Article
Very sensitive real-time inline process mass spectrometer based on FFT Ion Trap technique
Chung, Hin Yiu, Aliman, Michel, Fedosenko, Gennady, Laue, Alexander, Reuter, Rudiger, Derpmann, Valerie, Gorkhover, Leonid, Antoni, Martin
Published in 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2016)
Published in 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2016)
Get full text
Conference Proceeding
Journal Article
The Role of Oxygen and Surface Reactions in the Deposition of Silicon Oxide like Films from HMDSO at Atmospheric Pressure
Reuter, Rüdiger, Rügner, Katja, Ellerweg, Dirk, de los Arcos, Teresa, von Keudell, Achim, Benedikt, Jan
Published in Plasma processes and polymers (01.12.2012)
Published in Plasma processes and polymers (01.12.2012)
Get full text
Journal Article
이온화 장치를 포함하는 질량 분석기
REUTER RUDIGER, LAUE ALEXANDER, FEDOSENKO GENNADY, GORKHOVER LEONID, CHUNG HIN YIU ANTHONY
Year of Publication 02.12.2021
Get full text
Year of Publication 02.12.2021
Patent
질량 분석기 및 질량 분석법에 의한 가스 분석 방법
REUTER RUDIGER, BRACHTHAUSER YESSICA, CHUNG ANTHONY HIN YIU, BENTER THORSTEN, ALIMAN MICHEL
Year of Publication 31.05.2021
Get full text
Year of Publication 31.05.2021
Patent
공정의 실시간 모니터링 방법 및 질량 분광계
DERPMANN VALERIE, REUTER RUDIGER, LAUE ALEXANDER, LUNDQUIST THEODORE, FEDOSENKO GENNADY, GORKHOVER LEONID, ANTONI MARTIN, CHUNG HIN YIU ANTHONY, ALIMAN MICHEL, GORUS ANDREAS
Year of Publication 21.10.2019
Get full text
Year of Publication 21.10.2019
Patent
The Role of Oxygen and Surface Reactions in the Deposition of Silicon Oxide like Films from HMDSO at Atmospheric Pressure: Cold Atmospheric Plasmas
REUTER, Rudiger, RÜGNER, Katja, ELLERWEG, Dirk, DE LOS ARCOS, Teresa, KEUDELL, Achim Von, BENEDIKT, Jan
Published in Plasma processes and polymers (2012)
Get full text
Published in Plasma processes and polymers (2012)
Journal Article
IONIZATION DEVICE AND MASS SPECTROMETER THEREWITH
REUTER RUDIGER, AWAKOWICZ PETER, LAUE ALEXANDER, WINTER JORG, FEDOSENKO GENNADY, GORKHOVER LEONID, KEUDELL ACHIM VON, BENTER THORSTEN, BOKE MARC, ALIMAN MICHEL, CHUNG HIN YIU ANTHONY
Year of Publication 29.08.2017
Get full text
Year of Publication 29.08.2017
Patent
Mass spectrometer comprising an ionization device
Fedosenko, Gennady, Reuter, Rudiger, Chung, Hin Yiu Anthony, Gorkhover, Leonid, Laue, Alexander
Year of Publication 16.01.2024
Get full text
Year of Publication 16.01.2024
Patent
Mass spectrometer and method for analysing a gas by mass spectrometry
Chung, Anthony Hin Yiu, Reuter, Rudiger, Benter, Thorsten, Brachthaeuser, Yessica, Aliman, Michel
Year of Publication 17.10.2023
Get full text
Year of Publication 17.10.2023
Patent
MASS SPECTROMETER COMPRISING AN IONIZATION DEVICE
Fedosenko, Gennady, Reuter, Rudiger, Chung, Hin Yiu Anthony, Gorkhover, Leonid, Laue, Alexander
Year of Publication 02.06.2022
Get full text
Year of Publication 02.06.2022
Patent
MASS SPECTROMETER AND METHOD FOR ANALYSING A GAS BY MASS SPECTROMETRY
Chung, Anthony Hin Yiu, Reuter, Rudiger, Benter, Thorsten, Aliman, Michel, Bracht-Hauser, Yessica
Year of Publication 06.01.2022
Get full text
Year of Publication 06.01.2022
Patent
Removal of Model Proteins Using Beams of Argon Ions, Oxygen Atoms and Molecules: Mimicking the Action of Low‐Pressure Ar/O 2 ICP Discharges
Kylián, Ondřej, Benedikt, Jan, Sirghi, Lucel, Reuter, Rüdiger, Rauscher, Hubert, von Keudell, Achim, Rossi, François
Published in Plasma processes and polymers (03.04.2009)
Published in Plasma processes and polymers (03.04.2009)
Get full text
Journal Article
MASS SPECTROMETER COMPRISING IONIZATION DEVICE
REUTER RUDIGER, LAUE ALEXANDER, FEDOSENKO GENNADY, GORKHOVER LEONID, CHUNG HIN YIU ANTHONY
Year of Publication 28.01.2022
Get full text
Year of Publication 28.01.2022
Patent
Ionization device and mass spectrometer therewith
REUTER RUDIGER, AWAKOWICZ PETER, LAUE ALEXANDER, WINTER JORG, FEDOSENKO GENNADY, GORKHOVER LEONID, KEUDELL ACHIM VON, BENTER THORSTEN, BOKE MARC, ALIMAN MICHEL, CHUNG HIN YIU ANTHONY
Year of Publication 01.08.2017
Get full text
Year of Publication 01.08.2017
Patent