Fundamental aspects of substrate biasing: ion velocity distributions and nonlinear effects
Baloniak, Tim, Reuter, Rüdiger, von Keudell, Achim
Published in Journal of physics. D, Applied physics (25.08.2010)
Published in Journal of physics. D, Applied physics (25.08.2010)
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Journal Article
Insight into the Reaction Scheme of SiO2 Film Deposition at Atmospheric Pressure
Rügner, Katja, Reuter, Rüdiger, Ellerweg, Dirk, de los Arcos, Teresa, von Keudell, Achim, Benedikt, Jan
Published in Plasma processes and polymers (01.12.2013)
Published in Plasma processes and polymers (01.12.2013)
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Journal Article
The Role of Oxygen and Surface Reactions in the Deposition of Silicon Oxide like Films from HMDSO at Atmospheric Pressure
Reuter, Rüdiger, Rügner, Katja, Ellerweg, Dirk, de los Arcos, Teresa, von Keudell, Achim, Benedikt, Jan
Published in Plasma processes and polymers (01.12.2012)
Published in Plasma processes and polymers (01.12.2012)
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Journal Article
Removal of Model Proteins Using Beams of Argon Ions, Oxygen Atoms and Molecules: Mimicking the Action of Low‐Pressure Ar/O 2 ICP Discharges
Kylián, Ondřej, Benedikt, Jan, Sirghi, Lucel, Reuter, Rüdiger, Rauscher, Hubert, von Keudell, Achim, Rossi, François
Published in Plasma processes and polymers (03.04.2009)
Published in Plasma processes and polymers (03.04.2009)
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Journal Article
Very sensitive real-time inline process mass spectrometer based on FFT Ion Trap technique
Chung, Hin Yiu, Aliman, Michel, Fedosenko, Gennady, Laue, Alexander, Reuter, Rudiger, Derpmann, Valerie, Gorkhover, Leonid, Antoni, Martin
Published in 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2016)
Published in 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2016)
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Conference Proceeding
Journal Article
Removal of Model Proteins Using Beams of Argon Ions, Oxygen Atoms and Molecules: Mimicking the Action of Low-Pressure Ar/O2 ICP Discharges
Kylián, Ondřej, Benedikt, Jan, Sirghi, Lucel, Reuter, Rüdiger, Rauscher, Hubert, von Keudell, Achim, Rossi, François
Published in Plasma processes and polymers (03.04.2009)
Published in Plasma processes and polymers (03.04.2009)
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Journal Article
Ionization device with mass spectrometer therewith
Fedosenko, Gennady, Awakowicz, Peter, Reuter, Ruediger, Chung, Hin Yiu Anthony, Boeke, Marc, Benter, Thorsten, Aliman, Michel, Gorkhover, Leonid, Laue, Alexander, Winter, Joerg, von Keudell, Achim
Year of Publication 19.03.2019
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Year of Publication 19.03.2019
Patent
METHOD FOR EXAMINING A GAS BY MASS SPECTROMETRY AND MASS SPECTROMETER
Aliman Michel, Laue Alexander, Reuter Ruediger, Chung Hin Yiu Anthony, Gorkhover Leonid, Antoni Martin, Derpmann Valerie, Fedosenko Gennady, Gorus Andreas
Year of Publication 08.03.2018
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Year of Publication 08.03.2018
Patent
Mass spectrometer comprising an ionization device
GORKHOVER, LEONID, REUTER, RUEDIGER, FEDOSENKO, GENNADY, LAUE, ALEXANDER, CHUNG, ANTHONY HIN YIU
Year of Publication 01.03.2021
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Year of Publication 01.03.2021
Patent
Method for real-time monitoring of a process and mass spectrometer
GORKHOVER, LEONID, LUNDQUIST, THEODORE, DERPMANN, VALERIE, REUTER, RUEDIGER, CHUNG, HIN YIU ANTHONY, FEDOSENKO, GENNADY, ALIMAN, MICHEL, GORUS, ANDREAS, ANTONI, MARTIN, LAUE, ALEXANDER
Year of Publication 01.12.2022
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Year of Publication 01.12.2022
Patent
IONIZATION DEVICE WITH MASS SPECTROMETER THEREWITH
Winter Joerg, Aliman Michel, Laue Alexander, Reuter Ruediger, Benter Thorsten, Awakowicz Peter, Chung Hin Yiu Anthony, Gorkhover Leonid, Fedosenko Gennady, von Keudell Achim, Boeke Marc
Year of Publication 28.09.2017
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Year of Publication 28.09.2017
Patent
Method for real-time monitoring of a process and mass spectrometer
GORKHOVER, LEONID, LUNDQUIST, THEODORE, DERPMANN, VALERIE, REUTER, RUEDIGER, CHUNG, HIN YIU ANTHONY, FEDOSENKO, GENNADY, ALIMAN, MICHEL, GORUS, ANDREAS, ANTONI, MARTIN, LAUE, ALEXANDER
Year of Publication 01.09.2018
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Year of Publication 01.09.2018
Patent
Massenspektrometer mit einer Ionisierungseinrichtung
Chung, Anthony Hin Yiu, Fedosenko, Gennady, Gorkhover, Leonid, Laue, Alexander, Reuter, Rüdiger
Year of Publication 08.10.2020
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Year of Publication 08.10.2020
Patent