Battery vacuum equipment and turnover mechanism
ZHU YUANKANG, REN MINXIN, LI SHUANGZHOU, WANG CHEN, ZHANG WEIGUAN, TANG WENSHENG, SU SHIJIE, ZHANG CHENGHU
Year of Publication 08.11.2022
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Year of Publication 08.11.2022
Patent
Independent vacuum breaking and defrosting system for PVD (Physical Vapor Deposition) chamber body
ZHU YUANKANG, REN MINXIN, LI SHUANGZHOU, WANG CHEN, ZHANG WEIGUAN, TANG WENSHENG, SU SHIJIE, ZHANG CHENGHU
Year of Publication 20.09.2022
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Year of Publication 20.09.2022
Patent