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Year of Publication 24.08.2016
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Year of Publication 18.08.2016
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Vorrichtung zum Bearbeiten eines Substrats
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Year of Publication 15.08.2016
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Year of Publication 15.08.2016
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Method for producing capping wafer for sensor
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Year of Publication 25.12.2013
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Year of Publication 25.12.2013
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Sensor apparatus, production method for a sensor apparatus having at least one magnetic core and method for determining a field strength of a magnetic field in at least one spatial direction
ECKSTEIN, RAINER, BREITLING, ACHIM, DANNENBERG, ARNE, GENCOL, SEVKI, REICHENBACH, FRANK, PATAK, CHRISTIAN, SCHATZ, FRANK
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Year of Publication 16.12.2015
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SENSOR APPARATUS, PRODUCTION METHOD FOR A SENSOR APPARATUS HAVING AT LEAST ONE MAGNETIC CORE AND METHOD FOR DETERMINING A FIELD STRENGTH OF A MAGNETIC FIELD IN AT LEAST ONE SPATIAL DIRECTION
ECKSTEIN, RAINER, BREITLING, ACHIM, GENCOL, SEVKI, DANNENBERG, ARNE, REICHENBACH, FRANK, PATAK, CHRISTIAN, SCHATZ, FRANK
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Year of Publication 03.09.2015
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Micromechanical component and corresponding method for its manufacture
REICHENBACH FRANK, FUCHS TINO, KRONMUELLER SILVIA, LEINENBACH CHRISTINA, SCHELLING CHRISTOPH, LAERMER FRANZ
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Year of Publication 29.01.2009
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Sensorvorrichtung, Herstellungsverfahren für eine Sensorvorrichtung mit mindestens einem Magnetkern und Verfahren zum Ermitteln einer Feldstärke eines Magnetfelds in mindestens einer Raumrichtung
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Year of Publication 27.08.2015
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Microstructured Infrared Sensor
REICHENBACH FRANK, HOEFER HOLGER, SCHWEIKER MARK-ALEXANDER, FRANZ JOCHEN, MAURER DIETER
Year of Publication 13.03.2008
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Year of Publication 13.03.2008
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Sensor device has sensor element and circuit element, which are connected electrically over printed circuit board with contacting area for sensor element and contacting area for circuit element
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Year of Publication 31.01.2008
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Year of Publication 31.01.2008
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MICROMECHANICAL COMPONENT AND CORRESPONDING PRODUCTION METHOD
LAERMER, FRANZ, SCHELLING, CHRISTOPH, KRONMUELLER, SILVIA, REICHENBACH, FRANK, LEINENBACH, CHRISTINA, FUCHS, TINO
Year of Publication 24.10.2007
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Year of Publication 24.10.2007
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Sensor with at least one micromechanical structure, and method for producing it
REICHENBACH FRANK, PINTER STEFAN, HENNING FRANK, OFFENBERG MICHAEL, BAUMANN HELMUT, ARTMANN HANS, LAEMER FRANZ, BISCHOPINK GEORG
Year of Publication 25.09.2007
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Year of Publication 25.09.2007
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