Method for restoring operating state of magnetron discharge during magnetron sputtering, involves conductively switching insulated gate bipolar transistor for time periods when voltage at anode exceeds threshold values, respectively
REHN, STANELY, MIRRING, ENNO, LANG, WERNER, BENECKE, FRANK, TESCHNER, GOETZ
Year of Publication 05.05.2011
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Year of Publication 05.05.2011
Patent