Mechanism of SiN x H y Deposition from NH 3 ‐ SiH4 Plasma
Smith, Donald L., Alimonda, Andrew S., Chen, Chau‐Chen, Ready, Steven E., Wacker, Barbara
Published in Journal of the Electrochemical Society (01.02.1990)
Published in Journal of the Electrochemical Society (01.02.1990)
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Hydrogenated amorphous silicon thin-film transistor arrays fabricated by digital lithography
Wong, W.S., Ready, S.E., Jeng-Ping Lu, Street, R.A.
Published in IEEE electron device letters (01.09.2003)
Published in IEEE electron device letters (01.09.2003)
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