Verfahren zur Herstellung Asymmetrischer Seitenwand-Abstandshalter eines Halbleiterbauelements
WEINTRAUB, CHAD, RAY, DOUG S, FUSELIER, MARK B, BULLER, JAMES F, EHRICHS, EDWARD E
Year of Publication 17.06.2010
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Year of Publication 17.06.2010
Patent
Method of asymmetric sidewall spacer formation
S DOUG RAY, EDWARD E EHRICHS, JAMES F BULLER, CHAD WEINTRAUB, MARK B FUSELIER
Year of Publication 24.01.2007
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Year of Publication 24.01.2007
Patent
Method for asymmetric spacer formation
FUSELIER MARK B.,EHRICHS EDWARD E.,RAY S. DOUG,WEINTRAUB CHAD,BULLER JAMES F
Year of Publication 06.09.2006
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Year of Publication 06.09.2006
Patent
Method of asymmetric sidewall spacer formation
S DOUG RAY, EDWARD E EHRICHS, JAMES F BULLER, CHAD WEINTRAUB, MARK B FUSELIER
Year of Publication 05.07.2006
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Year of Publication 05.07.2006
Patent
Verfahren zur Herstellung Asymmetrischer Seitenwand-Abstandshalter
WEINTRAUB, CHAD, RAY, DOUG S, FUSELIER, MARK B, BULLER, JAMES F, EHRICHS, EDWARD E
Year of Publication 08.06.2006
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Year of Publication 08.06.2006
Patent
METHOD FOR ASYMMETRIC SIDEWALL SPACER FORMATION
WEINTRAUB CHAD, EHRICHS EDWARD E, RAY S. DOUG, FUSELIER MARK B, BULLER JAMES F
Year of Publication 23.05.2006
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Year of Publication 23.05.2006
Patent