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Year of Publication 13.08.2015
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Year of Publication 06.03.2013
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Year of Publication 06.03.2013
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Year of Publication 20.09.2012
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MICROELECTROMECHANICAL SYSTEM DEVICE INCLUDING A METAL PROOF MASS AND A PIEZOELECTRIC COMPONENT
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Year of Publication 20.09.2012
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Year of Publication 20.09.2012
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MICROMACHINED PIEZOELECTRIC THREE-AXIS GYROSCOPE AND STACKED LATERAL OVERLAP TRANSDUCER (SLOT) BASED THREE-AXIS ACCELEROMETER
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Year of Publication 03.11.2011
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Year of Publication 03.11.2011
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Year of Publication 03.11.2011
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Year of Publication 03.11.2011
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Micromachined piezoelectric three-axis gyroscope and stacked lateral overlap transducer (slot) based three-axis accelerometer
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Micromachined piezoelectric x-axis gyroscope
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Year of Publication 03.11.2011
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MICROMACHINED PIEZOELECTRIC X-AXIS GYROSCOPE
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Year of Publication 03.11.2011
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APPARATUS AND METHOD FOR LIMITING OVER TRAVEL IN A PROBE CARD ASSEMBLY
SHENOY RAVINDRA VAMAN, REYNOLDS CARL V, ELDRIDGE BENJAMIN N, COOPER TIMOTHY E
Year of Publication 28.05.2009
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Year of Publication 28.05.2009
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