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Year of Publication 31.03.2010
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Year of Publication 31.03.2010
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Suppression of oxygen precipitation in heavily doped single crystal silicon substrates
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Year of Publication 31.03.2010
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Year of Publication 31.03.2010
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DIFFUSION CONTROL IN HEAVILY DOPED SUBSTRATES
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Year of Publication 17.03.2010
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Diffusion control in heavily doped substrates
LEE, DONG-MYUN, RAVANI, MARCO, FALSTER, ROBERT J, CHO, CHAN-RAE, MOIRAGHI, LUCA, VORONKOV, VLADIMIR V
Year of Publication 16.05.2009
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Year of Publication 16.05.2009
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Suppression of oxygen precipitation in heavily doped single crystal silicon substrates
LEE, DONG-MYUN, RAVANI, MARCO, FALSTER, ROBERT J, CHO, CHAN-RAE, MOIRAGHI, LUCA
Year of Publication 01.05.2009
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Year of Publication 01.05.2009
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