RAPIDLY CLEANABLE ELECTROPLATING CUP SEAL
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Year of Publication 28.07.2011
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Closed contact electroplating cup assembly
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Year of Publication 26.07.2011
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Year of Publication 26.07.2011
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Methods and apparatus for wetting pretreatment for through resist metal plating
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Year of Publication 11.07.2017
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Methods and apparatus for flow isolation and focusing during electroplating
MAYER, STEVEN T, BUCKALEW, BRYAN L, BERKE, AARON, RASH, ROBERT, BANIK II, STEPHEN J, FORTNER, JAMES ISAAC, OBERST, JUSTIN
Year of Publication 01.06.2019
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Year of Publication 01.06.2019
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Rapidly cleanable electroplating cup assembly
GANESAN KOUSIK, EVANS BRIAN, MAJID TARIQ, GHONGADI SHANTINATH, BUCKALEW BRYAN, RASH ROBERT, VARADARAJAN SESHASAYEE, HAWKINS JEFF
Year of Publication 03.05.2011
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Year of Publication 03.05.2011
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Rapidly cleanable electroplating cup assembly
Ghongadi, Shantinath, Rash, Robert, Hawkins, Jeff, Varadarajan, Seshasayee, Majid, Tariq, Ganesan, Kousik, Buckalew, Bryan, Evans, Brian
Year of Publication 03.05.2011
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Year of Publication 03.05.2011
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Apparatus and method for modulating azimuthal uniformity in electroplating
MAYER, STEVEN T, CHUA, LEE PENG, RASH, ROBERT, BERKE, AARON, GRAHAM, GABRIEL HAY
Year of Publication 01.05.2017
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Year of Publication 01.05.2017
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CONTACT RING, LIPSEAL AND CONTACT RING ASSEMBLY
GANESAN KOUSIK, HE ZHIAN, BUCKALEW BRYAN L, TAKADA YUICHI, PRABHAKAR VINAY, MAYER STEVEN T, REID JONATHAN D, GHONGADI SHANTINATH, ZIBRIDA JAMES R, RASH ROBERT
Year of Publication 29.08.2013
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Year of Publication 29.08.2013
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Apparatus and method for electrodeposition of metals with the use of an ionically resistive ionically permeable element having spatially tailored resistivity
MAYER, STEVEN T, KAGAJWALA, BURHANUDDIN, BUCKALEW, BRYAN L, CHUA, LEE PENG, BERKE, AARON, RASH, ROBERT
Year of Publication 16.03.2017
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Year of Publication 16.03.2017
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Integrated elastomeric lipseal and cup bottom for reducing wafer sticking
MAYER, STEVEN T, KUMAR, SANTOSH, BERKE, AARON, RASH, ROBERT, CHUA, LEE PENG
Year of Publication 16.03.2017
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Year of Publication 16.03.2017
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Integrated Elastomeric Lipseal And Cup Bottom For Reducing Wafer Sticking
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Year of Publication 18.01.2017
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Year of Publication 18.01.2017
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Apparatus and method for modulating azimuthal uniformity in electroplating
MAYER, STEVEN T, RASH, ROBERT, BERKE, AARON, CHUA, LEE PENG, GRAHAM, GABRIEL HAY
Year of Publication 21.12.2016
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Year of Publication 21.12.2016
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