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"RASCHKE, SEBASTIAN"
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"RASCHKE, SEBASTIAN"
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열 파이프들에 의한 전기적으로 디커플링된 전극의 균일한 온도 제어를 위한 시스템 및 이러한 종류의 시스템을 포함하는 처리 설비
by
RASCHKE SEBASTIAN
,
BOEHM CHRISTIAN
Year of Publication
26.08.2020
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기판을 이송하기 위한 장치, 그러한 장치의 기판 캐리어에 적합화된 수용 플레이트를 갖는 처리 장치, 기판을 이송하기 위한 그러한 장치를 사용하여 기판을 프로세싱하는 방법, 및 처리 시스템
by
ANSORGE ERIK
,
RASCHKE SEBASTIAN
,
KEHR MIRKO
,
SCHLEMM HERMANN
Year of Publication
19.02.2020
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기판 처리 장치
by
RASCHKE SEBASTIAN
,
ANSORGE ERIK
,
KEHR MIRKO
,
BOHM CHRISTIAN
Year of Publication
15.05.2018
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기판 캐리어
by
RASCHKE SEBASTIAN
,
ANSORGE ERIK
,
KEHR MIRKO
,
BOHM CHRISTIAN
Year of Publication
02.05.2018
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Sistema para el control de temperatura uniforme y el desacoplamiento eléctrico de un electrodo por medio de tuberías de calor, e instalación de tratamiento que comprende un sistema de este tipo
by
BÖHM, Christian
,
RASCHKE
,
Sebastian
Year of Publication
05.03.2024
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SYSTEM FOR ELECTRICALLY DECOUPLED, HOMOGENEOUS TEMPERATURE CONTROL OF AN ELECTRODE BY MEANS OF HEAT CONDUCTION TUBES, AND PROCESSING FACILITY COMPRISING SUCH A SYSTEM
by
BÖHM, Christian
,
RASCHKE
,
Sebastian
Year of Publication
30.08.2023
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SYSTEM FOR ELECTRICALLY DECOUPLED, HOMOGENEOUS TEMPERATURE CONTROL OF AN ELECTRODE BY MEANS OF HEAT CONDUCTION TUBES, AND PROCESSING FACILITY COMPRISING SUCH A SYSTEM
by
BÖHM, Christian
,
RASCHKE
,
Sebastian
Year of Publication
30.08.2023
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TREATMENT MODULE
by
HEINZE ANDREAS
,
RASCHKE SEBASTIAN
,
MAI JOACHIM
,
MUELLER DANNY
Year of Publication
06.11.2014
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SYSTEM FOR ELECTRICALLY DECOUPLED, HOMOGENEOUS TEMPERATURE CONTROL OF AN ELECTRODE BY MEANS OF HEAT CONDUCTION TUBES, AND PROCESSING FACILITY COMPRISING SUCH A SYSTEM
by
BÖHM, Christian
,
RASCHKE
,
Sebastian
Year of Publication
25.03.2021
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SYSTEM FOR ELECTRICALLY DECOUPLED, HOMOGENEOUS TEMPERATURE CONTROL OF AN ELECTRODE BY MEANS OF HEAT CONDUCTION TUBES, AND PROCESSING FACILITY COMPRISING SUCH A SYSTEM
by
BÖHM, Christian
,
RASCHKE
,
Sebastian
Year of Publication
28.10.2020
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SYSTEM FOR ELECTRICALLY DECOUPLED, HOMOGENEOUS TEMPERATURE CONTROL OF AN ELECTRODE BY MEANS OF HEAT CONDUCTION TUBES, AND PROCESSING FACILITY COMPRISING SUCH A SYSTEM
by
BÖHM, Christian
,
RASCHKE
,
Sebastian
Year of Publication
29.07.2020
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DEVICE FOR TRANSPORTING A SUBSTRATE, TREATMENT DEVICE WITH A RECEIVING PLATE ADAPTED TO A SUBSTRATE CARRIER OF A DEVICE OF THIS KIND, AND METHOD FOR PROCESSING A SUBSTRATE USING A DEVICE OF THIS KIND FOR THE TRANSPORT OF A SUBSTRATE, AND TREATMENT FACILITY
by
SCHLEMM, Hermann
,
KEHR, Mirko
,
ANSORGE, Erik
,
RASCHKE
,
Sebastian
Year of Publication
29.08.2024
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Device for transporting substrate, treatment device with receiving plate adapted to substrate carrier of a device of this kind, and method for processing a substrate using a device of this kind for the transport of a substrate, and treatment facility
by
Kehr, Mirko
,
Raschke
,
Sebastian
,
Ansorge, Erik
,
Schlemm, Hermann
Year of Publication
11.06.2024
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System zur elektrisch entkoppelten, homogenen Temperierung einer Elektrode mittels Wärmeleitrohren sowie Bearbeitungsanlage mit einem solchen System
by
Raschke
,
Sebastian
,
Böhm, Christian
Year of Publication
09.11.2023
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SUBSTRATE CARRIER
by
KEHR, Mirko
,
ANSORGE, Erik
,
BOHM, Christian
,
RASCHKE
,
Sebastian
Year of Publication
29.11.2022
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SUBSTRATE SUPPORT
by
KEHR, Mirko
,
ANSORGE, Erik
,
BOEHM, Christian
,
RASCHKE
,
Sebastian
Year of Publication
28.06.2022
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SUBSTRATE TREATMENT APPARATUS
by
KEHR, Mirko
,
ANSORGE, Erik
,
BOHM, Christian
,
RASCHKE
,
Sebastian
Year of Publication
30.05.2022
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SUBSTRATE TREATMENT DEVICE
by
Kehr, Mirko
,
ANSORGE, Erik
,
BOEHM, Christian
,
RASCHKE
,
Sebastian
Year of Publication
28.01.2022
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DEVICE FOR TRANSPORT OF A SUBSTRATE, TREATMENT DEVICE WITH A HOLDER PLATE ADAPTED TO A SUBSTRATE HOLDER OF SUCH A DEVICE AND A METHOD FOR PROCESSING A SUBSTRATE USING SUCH A DEVICE FOR TRANSPORTING A SUBSTRATE AND TREATMENT PLANT
by
KEHR, MIRKO
,
ANSORGE, ERIK
,
RASCHKE
,
SEBASTIAN
,
SCHLEMM, HERMANN
Year of Publication
13.12.2021
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SUBSTRATE SUPPORT
by
BÖHM, Christian
,
KEHR, Mirko
,
ANSORGE, Erik
,
RASCHKE
,
Sebastian
Year of Publication
01.12.2021
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