STABLE ALKENYL OR ALKYNYL-CONTAINING ORGANOSILICON PRECURSOR COMPOSITIONS
MAYORGA STEVE GERARD, WANG MEILIANG, XIAO MANCHAO, OSTERWALDER NEIL, VRTIS RAYMOND N, LEI XINJIAN, RIDGEWAY ROBERT G, RAO MADHUKAR B
Year of Publication 07.12.2023
Get full text
Year of Publication 07.12.2023
Patent
막을 증착하는 방법
CHANDRA HARIPIN, XIAO MANCHAO, MACDONALD MATTHEW R, SPENCE DANIEL P, PEARLSTEIN RONALD MARTIN, LEI XINJIAN, RAO MADHUKAR B
Year of Publication 05.09.2022
Get full text
Year of Publication 05.09.2022
Patent
실리콘 및 질소 함유 막의 제조 방법
KIM MOO SUNG, MACDONALD MATTHEW R, LEI XINJIAN, LEE SE WON, RAO MADHUKAR B
Year of Publication 30.04.2021
Get full text
Year of Publication 30.04.2021
Patent
안정한 알케닐 또는 알키닐-함유 오가노실리콘 전구체 조성물
MAYORGA STEVE GERARD, WANG MEILIANG, XIAO MANCHAO, OSTERWALDER NEIL, VRTIS RAYMOND N, LEI XINJIAN, RIDGEWAY ROBERT G, RAO MADHUKAR B
Year of Publication 29.03.2021
Get full text
Year of Publication 29.03.2021
Patent
Porous low k structural design to meet next generation interconnect needs
Matz, Laura, Haas, Mary K, Vrtis, Raymond N, Xuezhong Jiang, Aiping Wu, Rao, Madhukar B, O'Neill, Mark L
Published in 2010 IEEE International Interconnect Technology Conference (01.06.2010)
Published in 2010 IEEE International Interconnect Technology Conference (01.06.2010)
Get full text
Conference Proceeding
HYDROGEN RECOVERY BY ABSORBENT MEMBRANES
ABRARDO, JOSEPH M, BAADE, WILLIAM F, SHIVAJI, SIRCAR, RAO, MADHUKAR B
Year of Publication 27.04.1998
Get full text
Year of Publication 27.04.1998
Patent
STI Post CMP Cleaning Solution Development
Tamboli, Dnyanesh, Banerjee, Gautam, Subramanian, Paramasivan, Rao, Madhukar B.
Published in ECS transactions (24.10.2008)
Published in ECS transactions (24.10.2008)
Get full text
Journal Article
METHOD FOR DEPOSITING A FILM
RAO, Madhukar, B, SPENCE, Daniel, P, LEI, Xinjian, CHANDRA, Haripin, PEARLSTEIN, Ronald, Martin, MACDONALD, Matthew, R, XIAO, Manchao
Year of Publication 04.09.2024
Get full text
Year of Publication 04.09.2024
Patent