CAPPING POLY CHANNEL PILLARS IN STACKED CIRCUITS
RAMALINGAM SHYAM, SRINIVASAN PRASANNA, LI HONGQI, DAMARLA GOWRISANKAR, LU JIN, LINDSAY ROGER, BIAN ZAILONG
Year of Publication 11.05.2017
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Year of Publication 11.05.2017
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METHOD FOR FORMING A METAL CAP IN A SEMICONDUCTOR MEMORY DEVICE
RAMALINGAM SHYAM, DAMARLA GOWRISANKAR, LI HONGQI, LU JIN, BALAKRISHNAN MURALIKRISHNAN, BIAN ZAILONG, ZHU XIAOYUN
Year of Publication 25.01.2017
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Year of Publication 25.01.2017
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Interconnect assemblies with through-silicon vias and stress-relief features
Damarla, Gowrisankar, Lu, Jin, Ramalingam, Shyam, Li, Hongqi, Jindal, Anurag
Year of Publication 24.11.2020
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Year of Publication 24.11.2020
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Abstraction of hydrogen by SiH 3 from hydrogen-terminated Si(001)-(2×1) surfaces
Ramalingam, Shyam, Maroudas, Dimitrios, Aydil, Eray S, Walch, Stephen P
Published in Surface science (1998)
Published in Surface science (1998)
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Capping poly channel pillars in stacked circuits
Damarla, Gowrisankar, Lindsay, Roger, Lu, Jin, Bian, Zailong, Srinivasan, Prasanna, Ramalingam, Shyam, Li, Hongqi
Year of Publication 11.06.2019
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Year of Publication 11.06.2019
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