가열 및 척킹 능력들을 갖는 정전 척
SHIRAHATTI LAKSHMIKANTH KRISHNAMURTHY, RAJENDRAN HARI PRASATH, SATYAVOLU NITIN BHARADWAJ, BREZOCZKY THOMAS, YEDLA SRINIVASA RAO, PRASAD BHASKAR, SAVANDAIAH KIRANKUMAR NEELASANDRA
Year of Publication 11.04.2023
Get full text
Year of Publication 11.04.2023
Patent
고온 및 진공 격리 프로세싱 미니 환경들
SHIRAHATTI LAKSHMIKANTH KRISHNAMURTHY, RAJENDRAN HARI PRASATH, MILLER KEITH A, SATYAVOLU NITIN BHARADWAJ, BREZOCZKY THOMAS, YEDLA SRINIVASA RAO, SAVANDAIAH KIRANKUMAR NEELASANDRA
Year of Publication 03.02.2023
Get full text
Year of Publication 03.02.2023
Patent
Electrostatic chuck having a heating and chucking capabilities
Shirahatti, Lakshmikanth Krishnamurthy, Prasad, Bhaskar, Satyavolu, Nitin Bharadwaj, Savandaiah, Kirankumar Neelasandra, Yedla, Srinivasa Rao, Rajendran, Hari Prasath, Brezoczky, Thomas
Year of Publication 21.03.2023
Get full text
Year of Publication 21.03.2023
Patent
AN ELECTROSTATIC CHUCK HAVING A HEATING AND CHUCKING CAPABILITIES
RAJENDRAN, Hari Prasath, BREZOCZKY, Thomas, PRASAD, Bhaskar, YEDLA, Srinivasa Rao, SATYAVOLU, Nitin Bharadwaj, SHIRAHATTI, Lakshmikanth Krishnamurthy, SAVANDAIAH, Kirankumar Neelasandra
Year of Publication 24.03.2022
Get full text
Year of Publication 24.03.2022
Patent
ELECTROSTATIC CHUCK HAVING A HEATING AND CHUCKING CAPABILITIES
RAJENDRAN, Hari Prasath, BREZOCZKY, Thomas, PRASAD, Bhaskar, YEDLA, Srinivasa Rao, SATYAVOLU, Nitin Bharadwaj, SHIRAHATTI, Lakshmikanth Krishnamurthy, SAVANDAIAH, Kirankumar Neelasandra
Year of Publication 24.03.2022
Get full text
Year of Publication 24.03.2022
Patent
HIGH TEMPERATURE AND VACUUM ISOLATION PROCESSING MINI ENVIRONMENTS
RAJENDRAN, Hari Prasath, BREZOCZKY, Thomas, SATYAVOLU, Nitin Bharadwaj, YEDLA, Srinivasa Rao, SHIRAHATTI, Lakshmikanth Krishnamurthy, SAVANDAIAH, Kirankumar Neelasandra, MILLER, Keith A
Year of Publication 09.12.2021
Get full text
Year of Publication 09.12.2021
Patent
HIGH TEMPERATURE AND VACUUM ISOLATION PROCESSING MINI-ENVIRONMENTS
RAJENDRAN, Hari Prasath, BREZOCZKY, Thomas, SATYAVOLU, Nitin Bharadwaj, YEDLA, Srinivasa Rao, SHIRAHATTI, Lakshmikanth Krishnamurthy, SAVANDAIAH, Kirankumar Neelasandra, MILLER, Keith A
Year of Publication 02.12.2021
Get full text
Year of Publication 02.12.2021
Patent
An electrostatic chuck having a heating and chucking capabilities
SAVANDAIAH, KIRANKUMAR NEELASANDRA, SHIRAHATTI, LAKSHMIKANTH KRISHNAMURTHY, BREZOCZKY, THOMAS, SATYAVOLU, NITIN BHARADWAJ, RAJENDRAN, HARI PRASATH, PRASAD, BHASKAR, YEDLA, SRINIVASA RAO
Year of Publication 16.06.2022
Get full text
Year of Publication 16.06.2022
Patent
High temperature and vacuum isolation processing mini environments
SAVANDAIAH, KIRANKUMAR NEELASANDRA, SHIRAHATTI, LAKSHMIKANTH KRISHNAMURTHY, MILLER, KEITH A, BREZOCZKY, THOMAS, SATYAVOLU, NITIN BHARADWAJ, RAJENDRAN, HARI PRASATH, YEDLA, SRINIVASA RAO
Year of Publication 16.12.2021
Get full text
Year of Publication 16.12.2021
Patent