Reaction inducing unit, substrate treating apparatus, and thin-film deposition method
BAEK SUNG GYU, BANG HONG JOO, RA JONG HOON, KIM KWANG SOO, SHIN DONG HWA, KIM MIN SEOK, KO JAE GUK, KIM SEUL KI, CHOI JANG WON
Year of Publication 27.07.2016
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Year of Publication 27.07.2016
Patent
REACTION INDUCING UNIT, SUBSTRATE TREATING APPARATUS, AND THIN-FILM DEPOSITION METHOD
KO, JAE GUK, RA, JONG HOON, BANG, HONG JOO, SHIN, DONG HWA, KIM, KWANG SOO, BAEK, SUNG GYU, KIM, SEUL KI, CHOI, JANG WON, KIM, MIN SEOK
Year of Publication 21.05.2015
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Year of Publication 21.05.2015
Patent